Chemical Vapor Deposition Overview [Spiral-bound]

Texas Engineering Extension Service (Author)

Book Description

Publication Date: March 1, 1997

This course is designed to assist equipment and process technicians and operators solve CVD-related problems and gain a better understanding of CVD processing issues. To this end, many different theoretical and practical topics of both equipment and processes will be presented.

By the end of the course the students should have a basic understanding of:

1. Why CVD is important in semiconductor fabrication

2. The typical chemistry and principles of the several types of CVD processes

3. The key process and quality issues

4. To provide an overview of the types of process equipment used

Editorial Reviews

About the Author

Since 1919, the Texas Engineering Extension Service (TEEX) has worked hand-in-hand with industry leaders to increase productivity and safety in the workplace. The agency, with its hands-on approach to vocational and technical training and cutting-edge technology, has led the way with innovative programs that meet the needs of a growing and dynamic marketplace.

TEEX is dedicated to serving the needs of clients through training, retraining, continuing education, technical assistance and technology transfer. The agency offers more than 700 different programs that range from eight to 1,980 clock hours. More than 300 of its training courses focus on the needs of private industry. The other 400 courses assist public agencies in complying with local policies and meeting state and federal laws.

Product Details

• Spiral-bound: 65 pages
• Publisher: TEEX/Technology and Economic Development (March 1, 1997)
• ISBN-10: 1582570035
• ISBN-13: 978-1582570037
• Amazon Best Sellers Rank: #10,528,698 in Books (See Top 100 in Books)