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Dynamics of Microelectromechanical Systems (Microsystems) Hardcover – October 3, 2007

ISBN-13: 978-0387736983 ISBN-10: 0313283907 Edition: 2007th

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From the Back Cover

This work presents a systematic view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission.

Features of this work include:

  • An in-depth treatment of problems that involve reliable modeling, analysis and design,
  • Analytical models with correct dependences on service dimensions,
  • Cantilever based systems for nanofabrication researchers and designers, and
  • Dynamics of complex spring and beam microsystems.

Although not designed for a specific course, this material could be used as a text at the upper-undergraduate/graduate level, and, as such, it contains numerous fully-solved examples as well as many end-of-the-chapter proposed problems. This is a follow up to the book, Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained.

Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists.

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