Review
`Dr. Zhang provides an encyclopedic compilation of the literature on the many electrochemical effects that impact the processing of silicon and its native oxide. This book will be an important reference for the silicon specialist and may have within its pages that key detail which will explain process anomalies to the MEMS practitioner.' Steve Senturia, Weller Professor of Electrical Engineering, Massachusetts Institute of Technology `This book is a must for every laboratory where semiconductor electrochemsitry is actively pursued. It is a welcome and recommended addition to every library of an institution where electrochemistry is a suibject of active research.' Journal of Solid State Electrochemistry, 7:5
Product Description
The importance of electrochemistry in silicon technology has spurred intense research activity in the last five decades, resulting in a tremendous amount of experimental data and theoretical formulations. This book is a compilation and digestion of this body of information with a comprehensive collection of concrete data on the electrochemical properties of silicon, thorough characterization and analysis of the diverse phenomena of silicon electrodes, and systematic integration of concepts and theories on the reaction mechanisms.
Covering all the scientific aspects and engineering applications involved in the silicon/liquid interface, this large body of information will be highly valuable for the current and future progress of the silicon science and technology.
Covering all the scientific aspects and engineering applications involved in the silicon/liquid interface, this large body of information will be highly valuable for the current and future progress of the silicon science and technology.
