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Electronic Materials: Science and Technology
 
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Electronic Materials: Science and Technology [Hardcover]

Shyam P. Murarka (Author), Martin C. Peckerar (Author)


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Book Description

October 12, 1989 0125111207 978-0125111201
Written as an intermediate-level text, this book will also be a good reference source for practicing engineers and scientists who are interested in electronic materials and devices. After presenting an introduction to electronic devices, the authors describe the processing of a complementary MOS (CMOS) circuit including fundamental physical and materials concepts. Other areas of electronic material processing covered include crystal growth, oxidation, diffusion, ion implantation, metallization, chemical vapor deposition, lithography concepts and tools, and etching. It also discusses advanced processes and possibilities for the future.

Editorial Reviews

Review

It is well worth having a personal copy of this book if you are working in the field of IC technology. It is also recommended as a good text book for graduate students.
--PHYSICS IN CANADA
'Electronic Materials: Science and Technology' is a comprehensive and up-to-date book covering silicon semiconductor processing technology. It is aimed at senior level or first year graduate student audiences and thus could be a good choice for a textbook with similar coverage to Sze's 'VLSI Technology'.
--AUSTRALIAN PHYSICIST

Product Details

  • Hardcover: 622 pages
  • Publisher: Academic Press (October 12, 1989)
  • Language: English
  • ISBN-10: 0125111207
  • ISBN-13: 978-0125111201
  • Product Dimensions: 9 x 6 x 1 inches
  • Shipping Weight: 1.4 pounds
  • Amazon Best Sellers Rank: #5,362,013 in Books (See Top 100 in Books)

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