Enabling Technologies for MEMS and Nanodevices (Advanced Micro and Nanosystems) [Hardcover]

Henry Baltes (Editor), Oliver Brand (Editor), Gary K. Fedder (Editor), Christofer Hierold (Editor), Jan G. Korvink (Editor), Osamu Tabata (Editor)

Book Description

ISBN-10: 352730746X | ISBN-13: 978-3527307463 | Publication Date: September 6, 2004 | Edition: 1

Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps.

Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces, prosthetics, miniaturized medical and surgery equipment and many more opportunities are being explored.

This new series, Advanced Micro & Nanosystems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.

Editorial Reviews

Review

"…an excellent book that gives and good overview and discussion of sensors and devices commonly found in the field of MEMS as well as more advanced devices…" (MRS Bulletin, March 2006)

"Overall, the book gives good insight into very recent technologies, developments, and practical applications in the MEMS field. I would recommend this book as supplementary reading for graduate students, but not as a class text since the book assumes the reader already has fundamental knowledge in this research field. The book is also a very useful source for professionals in related areas of materials science and mechanical and chemical engineering who want to become aware of emerging MEMS technologies." (Advanced Materials)

From the Back Cover

Advanced Micro & Nanosystems (AMN) provides cutting-edge reviews and detailed case studies by top authors from science and industry, covering technologies, devices and advanced systems from the micro and nano worlds, which together have an immense innovative application potential that opens up with control of shape and function from the atomic level right up to the visible world without any technological gaps.

In this volume, a close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefits of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scanning micro- and nanoprobes.

The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.

See all Editorial Reviews

Product Details

• Hardcover: 439 pages
• Publisher: Wiley-VCH; 1 edition (September 6, 2004)
• Language: English
• ISBN-10: 352730746X
• ISBN-13: 978-3527307463
• Product Dimensions: 7 x 1 x 9.7 inches
• Shipping Weight: 2 pounds (View shipping rates and policies)
• Amazon Best Sellers Rank: #3,628,613 in Books (See Top 100 in Books)

More About the Author

Jan G. Korvink is a Professor for Microsystems Engineering at the University of Freiburg in South Germany, where he leads the Laboratory for Microsystem Simulation.

He obtained his M.Sc. in mechanical engineering (specialising in computational mechanics) from the University of Cape Town in 1987, and his Ph.D. in applied computer science from the ETH Zurich in 1993. After his graduate studies, he joined the Physical Electronics Laboratory of the ETH Zurich, where he established and lead a MEMS Modelling Group. This was followed by a move in 1997 to the Albert Ludwig University in Freiburg, Germany. Currently, Dr. Korvink is a director of the School for Soft Matter Research, Freiburg Institute for Advanced Studies. He has written more that 180 journal and conference papers in the area of microsystem technology, and co-edits the review journal Applied Micro and Nanosystems, see http://www.wiley-vch.de/books/info/amn.

His research interests cover the computational design and low cost fabrication of microsystems, with a focus on applications in magnetic resonance.