First Sentence:
Since Richard Feynman's thought-provoking 1959 speech "There's Plenty of Room at the Bottom" [1], humanity has witnessed the most rapid technology development in its history-the miniaturization of electronic devices.
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Key Phrases - Statistically Improbable Phrases (SIPs):
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microflow sensors, rectification pumps, etch access, invalid measurement points, microstereo lithography, fluidic access, external flow control, thermopneumatic actuators, thermal flow sensors, microfluidics research, bossed membrane, calorimetric type, fluidic interconnects, nonmechanical pumps, parylene layer, actuation fluid, particle image displacement, thermopneumatic valve, shear stress sensors, four flexures, internal flow control, embedded mask, induction pump, interrogation window, constant heating power
Key Phrases - Capitalized Phrases (CAPs):
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International Conference, Proceedings of Transducers, New York, Hilton Head Island, San Diego, Kluwer Academic Publishers, Micro Total Analysis Systems, Analytical Chemistry, Journal of Microelectromechanical Systems, Microsystem Technologies, Metal Figure, San Francisco, Applied Physics, Exp Fluids, Massachusetts Institute of Technology, Boca Raton, Cambridge University Press, Electron Devices, Glass Figure, International Workshop Micro Electromechanical Svstem, Anisotropic Etching of Silicon, Measurement Science Technology, Biomedical Engineering, Experimental Flow Characterization, Heater Pressure
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