Fundamentals of Microfabrication [Hardcover]

Marc J. Madou (Author)

Book Description

ISBN-10: 0849394511 | ISBN-13: 978-0849394515 | Publication Date: February 1, 1998 | Edition: 1

Fundamentals of Microfabrication is the first book to examine all aspects of the attempt to build functional devices at a molecular size. Ten chapters discuss in detail topics such as lithography, pattern transfer, wet and dry bulk micromachining, surface micromachining, and LIGA. Alternative micromachining technologies are described and electronics used with micromachined devices are examined. Bonding and packaging issues are defined. The book also presents quantum structures and reviews molecular engineering. Numerous appendices offer valuable information in an easily accessible format.

Editorial Reviews

Review

The Fundamentals of Microfabrication describes the science of miniaturization, which demonstrates ways of making devices using smaller and smaller materials. This book brings an understanding of manufacturing options, material choices, and size...This book is well written and very informative for anyone interested in this area of engineering and could be used in an advanced course for the study of microfabrication.
-Diane Kauzlarick, EET --This text refers to an out of print or unavailable edition of this title.

About the Author

University of California, Irvine, USA --This text refers to an alternate Hardcover edition.

Product Details

• Hardcover: 589 pages
• Publisher: CRC-Press; 1 edition (February 1, 1998)
• Language: English
• ISBN-10: 0849394511
• ISBN-13: 978-0849394515
• Product Dimensions: 11.3 x 8.8 x 1.6 inches
• Shipping Weight: 4.4 pounds
• Average Customer Review: 4.5 out of 5 stars  See all reviews (8 customer reviews)
• Amazon Best Sellers Rank: #1,399,093 in Books (See Top 100 in Books)

Customer Reviews

Most Helpful Customer Reviews

19 of 23 people found the following review helpful:

5.0 out of 5 stars Fundamentals of Microfabrication, May 27, 2000

By 

Adisorn Tuantranont - See all my reviews

This review is from: Fundamentals of Microfabrication (Hardcover)

This book helps you explore the world of micromachines and miniaturization. First 6 chapters review and explain the methodogy of microfabrications including micromachining technologies available today. Chapter 7 compares traditional and non-traditional microfabrication tools for different applications. New device development and hot topics of micromachined packaging are explored in chapter 8. Nice up-to-date list of hyperlinked documents from all around the world is placed at the end of the book for futher exploring the world of micromachining and microfabrication.

3.0 out of 5 stars Sort of Confusing, October 10, 2011

By 

Saran Kiyabu "saran" (Honolulu, HI USA) - See all my reviews

Amazon Verified Purchase

This review is from: Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition (Hardcover)

It covers a lot of material and has some good pictures, but definitions and equations are a little terse or confusing. The book is also heavy...

5.0 out of 5 stars The Best of its Kind, February 9, 2011

By 

Demented Mouse - See all my reviews

Amazon Verified Purchase

This review is from: Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition (Hardcover)

This book is the single best resource anyone can have for microfabrication. It's incredibly thorough in the content that it covers and goes into great detail on not only what processes exist for MEMS fabrication but also HOW it's done, WHY it happens (the physics behind it), and even a history behind the processes. Even as thorough as it is, this book is still pretty easy to follow and requires little background knowledge on the subject.

Definitely a must-have for anyone that will be working with MEMS or nanotechnology, even if as nothing more than a reference book.