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Fundamentals of Microfabrication
on May 27, 2000
This book helps you explore the world of micromachines and miniaturization. First 6 chapters review and explain the methodogy of microfabrications including micromachining technologies available today. Chapter 7 compares traditional and non-traditional microfabrication tools for different applications. New device development and hot topics of micromachined packaging are explored in chapter 8. Nice up-to-date list of hyperlinked documents from all around the world is placed at the end of the book for futher exploring the world of micromachining and microfabrication.