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Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition Hardcover – March 13, 2002

ISBN-13: 978-0849308260 ISBN-10: 0849308267 Edition: 2nd

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Product Details

  • Hardcover: 752 pages
  • Publisher: CRC Press; 2 edition (March 13, 2002)
  • Language: English
  • ISBN-10: 0849308267
  • ISBN-13: 978-0849308260
  • Product Dimensions: 11.3 x 8.8 x 1.9 inches
  • Shipping Weight: 4.4 pounds
  • Average Customer Review: 4.5 out of 5 stars  See all reviews (11 customer reviews)
  • Amazon Best Sellers Rank: #1,125,024 in Books (See Top 100 in Books)

Editorial Reviews

Review

The Fundamentals of Microfabrication describes the science of miniaturization, which demonstrates ways of making devices using smaller and smaller materials. This book brings an understanding of manufacturing options, material choices, and size...This book is well written and very informative for anyone interested in this area of engineering and could be used in an advanced course for the study of microfabrication.
-Diane Kauzlarick, EET

About the Author

University of California, Irvine, USA --This text refers to an alternate Hardcover edition.

Customer Reviews

4.5 out of 5 stars
5 star
73%
4 star
9%
3 star
18%
2 star
0%
1 star
0%
See all 11 customer reviews
Pretty good paper quality of the book.
Martin
Definitely a must-have for anyone that will be working with MEMS or nanotechnology, even if as nothing more than a reference book.
Demented Mouse
This book helps you explore the world of micromachines and miniaturization.
Adisorn Tuantranont

Most Helpful Customer Reviews

19 of 23 people found the following review helpful By Adisorn Tuantranont on May 27, 2000
Format: Hardcover
This book helps you explore the world of micromachines and miniaturization. First 6 chapters review and explain the methodogy of microfabrications including micromachining technologies available today. Chapter 7 compares traditional and non-traditional microfabrication tools for different applications. New device development and hot topics of micromachined packaging are explored in chapter 8. Nice up-to-date list of hyperlinked documents from all around the world is placed at the end of the book for futher exploring the world of micromachining and microfabrication.
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1 of 1 people found the following review helpful By flyintherain on May 7, 2012
Format: Hardcover Verified Purchase
The content is ok but I totally cannot understand why the publisher chose glassy paper. It's like a mirror or Ipad. My eyes feel very uncomfortable when reading it for even one minute!!
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By Demented Mouse on February 9, 2011
Format: Hardcover Verified Purchase
This book is the single best resource anyone can have for microfabrication. It's incredibly thorough in the content that it covers and goes into great detail on not only what processes exist for MEMS fabrication but also HOW it's done, WHY it happens (the physics behind it), and even a history behind the processes. Even as thorough as it is, this book is still pretty easy to follow and requires little background knowledge on the subject.

Definitely a must-have for anyone that will be working with MEMS or nanotechnology, even if as nothing more than a reference book.
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Format: Hardcover
Feynman noted that back in 1959. Nanotechnology, MEMS, microfluidics, labs on a chip, and NEMS have all gotten a lot of press more recently. This encyclopedic book remains the bible of manufacturing at the very small scale. I do not know of a replacement book yet, though some sections of this one are getting quite dated, especially, as noted in another review, the clean room section.
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Format: Hardcover Verified Purchase
Pretty good distribution of the topics in the three volumes. Useful information about MEMS, NEMS and biomedical aplications. Pretty good paper quality of the book.
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By Kwon, Jiseok on March 30, 2013
Format: Hardcover Verified Purchase
good!! very useful to me!!!
I want to recommend this product to my friends.
the color is very great apparently.
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