Customer Reviews

Fundamentals of Semiconductor Manufacturing and Process Control

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For those of you working in a fab, or designing processes to be used in it, May gives a good summary of what is generally known and non-proprietary. He explains the key steps in photolithography, wet and dry etching, the different ways to dope, and deposition processes.

But along with these steps, every fab needs to monitor them for quality control. So we get discussions of how to measure data about a wafer. Like using inteferometry or ellipsometry to measure the thickness of a deposited thin film. Or using a four point probe for capacitance or resistance measurements.

A lot of the text also deals with statistics and how to maximise your device yield. Involves numerous modelling choices and process controls.

The beginning chapters cover the semiconductor processes, and the last half chapters cover fundamental level of Statistical Process Control. Some explanations about the SPC are not sufficient because of the limited pages, compared to books of SPC. However, this book contains a lot of useful tables, and it is a good size to carry around. Thus, I think this is a good book to review SPC and Semiconductor Processes quickly.