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This chapter summarizes the main techniques currently available for the numerical simulation and computer-aided design of electron and ion optical systems.
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Key Phrases - Statistically Improbable Phrases (SIPs):
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trajectory displacement effect, accelerating voltage inspection, accelerating voltage operation, closest encounter approximation, discrete coulomb interactions, dynamic focus coils, geometric aberration coefficients, polepiece material, computed aberrations, beam projection system, deflection astigmatism, electron source types, asymmetry aberrations, beam regime, charged particle optics, crossover plane, electrostatic microscopes, unipotential lenses, magnetic electron lenses, axial field distributions, electron optical properties, narrow crossover, polepiece lens, emitter radius, best focus position
Key Phrases - Capitalized Phrases (CAPs):
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New York, Electron Microsc, Academic Press, Methods Phys, Electron Phys, Monte Carlo, University of Chicago, Editions de Physique, Les Ulis, Courtesy of Hughes Research Labs, Field Emission Symp, Oregon Graduate, Research Studies Press, Academia Sinica, Elsevier Science, Guns Figure, Institute of Electronics, Multinational Congress Electron, Plenum Press, Analytical Approach, John Wiley, Microcircuit Engineering, Oxford University, Parameter Dependencies When the Collisions, Philips Res
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