Copublished with IEE. This handbook contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Eleven chapters cover key aspects of micromachining and microfabrication, including numerous device applications.
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2 of 3 people found the following review helpful:
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For people interested in MEMS,
This review is from: Handbook of Microlithography, Micromachining, and Microfabrication. Volume 2: Micromachining and Microfabrication (SPIE PRESS Monograph Vol. PM40) (Spie Press Monograph, Pm39-Pm40) (Paperback)
This is a very useful book in MEMS. The content covers wet and dry etching, focused ion beams, plating, sensors, acuators, micro-optical devices and thin film transistor liquid crystal display.
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