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2 of 3 people found the following review helpful:
5.0 out of 5 stars
For people interested in MEMS,
This review is from: Handbook of Microlithography, Micromachining, and Microfabrication. Volume 2: Micromachining and Microfabrication (SPIE PRESS Monograph Vol. PM40) (Spie Press Monograph, Pm39-Pm40) (Paperback)
This is a very useful book in MEMS. The content covers wet and dry etching, focused ion beams, plating, sensors, acuators, micro-optical devices and thin film transistor liquid crystal display.
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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 2: Micromachining and Microfabrication (SPIE PRESS Monograph V... by P. Rai-Choudhury (Paperback - October 6, 1997)
$119.00
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