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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
 
 
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Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39) [Hardcover]

Harry J. Levinson (Author), Mark A. McCord (Author), Franco Cerrina (Author), Robert D. Allen (Author), John G. Skinner (Author), Andrew R. Neureuther (Author), Martin C. Peckerar (Author), F. Keith Perkins (Author), Michael J. Rooks (Author), P. Rai-Choudhury (Editor)
5.0 out of 5 stars  See all reviews (1 customer review) |
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Book Description

ISBN-10: 0819423785 | ISBN-13: 978-0819423788 | Publication Date: March 14, 1997
Copublished with IEE. The dynamic field of lithography demands an authoritative handbook for process development and production and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.

Contents

- Preface
- Introduction
- Optical Lithography
- Electron Beam Lithography
- X-ray Lithography
- Deep-UV Resist Technology
- Photomask fabrication procedures and limitations
- Metrology Methods in Photolithography
- Optical Lithography Modeling
- Issues in Nanolithography for Quantum Effect Device Manufacture
- Index

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Customers buy this book with Handbook of Microlithography, Micromachining, and Microfabrication. Volume 2: Micromachining and Microfabrication (SPIE PRESS Monograph Vol. PM40) (Spie Press Monograph, Pm39-Pm40) by P. Rai-Choudhury Paperback $113.09

Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39) + Handbook of Microlithography, Micromachining, and Microfabrication. Volume 2: Micromachining and Microfabrication (SPIE PRESS Monograph Vol. PM40) (Spie Press Monograph, Pm39-Pm40)
Price For Both: $222.85

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Product Details

  • Hardcover: 768 pages
  • Publisher: Society of Photo-Optical Instrumentation Engineers (March 14, 1997)
  • Language: English
  • ISBN-10: 0819423785
  • ISBN-13: 978-0819423788
  • Product Dimensions: 10.3 x 7.4 x 1.8 inches
  • Shipping Weight: 3.5 pounds (View shipping rates and policies)
  • Average Customer Review: 5.0 out of 5 stars  See all reviews (1 customer review)
  • Amazon Best Sellers Rank: #435,159 in Books (See Top 100 in Books)

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0 of 2 people found the following review helpful:
5.0 out of 5 stars For people interested in advanced lithography, April 4, 2000
This review is from: Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39) (Hardcover)
The book gives detailed description in electron beam lithography, X-ray lithography, deep-UV resist lithography and photomask fabrication, etc.
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Front Cover | Table of Contents | First Pages | Index | Back Cover | Surprise Me!
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Inside This Book (learn more)
First Sentence:
Microlithography is a term developed to denote a particular branch of lithography that is specifically applied to integrated circuit fabrication. Read the first page
Key Phrases - Capitalized Phrases (CAPs): (learn more)
New York, Laser Microlithography, Microelectronics Seminar, Academic Press, Plenum Press, Etec Systems, Monte Carlo, Noyes Publications, Park Ridge, Principles of Optics, Microelectronic Engineering, Semiconductor International, Solid State Technol, Vacuum Sci, Design Workshop, Optical Microlithography, Pergamon Press, Handbook of Semiconductor Wafer Cleaning Technology, Symposium Series, Leica Lithographie Systeme Jena, Microcircuit Engineering, Optical Engineering, San Jose, Applied Optics, Palo Alto
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