|
|||||||||||||||||||||||||||||||||||
|
1 Review
|
Average Customer Review
Share your thoughts with other customers
Create your own review
|
|
Most Helpful First | Newest First
|
|
0 of 2 people found the following review helpful:
5.0 out of 5 stars
For people interested in advanced lithography,
This review is from: Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39) (Hardcover)
The book gives detailed description in electron beam lithography, X-ray lithography, deep-UV resist lithography and photomask fabrication, etc.
|
|
Most Helpful First | Newest First
|
|
Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39) by Michael J. Rooks (Hardcover - March 14, 1997)
$119.00 $109.76
In Stock | |
 
| ||
