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4 of 5 people found the following review helpful:
3.0 out of 5 stars
Lacking detailed description of the plasma-kinetic model,
By A Customer
This review is from: Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology) (Hardcover)
Fair overview of basic plasma processing techniques. Because it's written by various experts in the field, the quality varies from chapter to chapter. The section on reactive ion etching comes highly recommended and is thoroughly referenced.
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Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Techno... by Jerome J. Cuomo (Hardcover - January 14, 1991)
$150.00 $118.60
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