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Handbook of Semiconductor Manufacturing Technology, Second Edition [Print Replica] [Kindle Edition]

Yoshio Nishi , Robert Doering
4.5 out of 5 stars  See all reviews (2 customer reviews)

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Book Description

Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on… Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.


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Texas Instruments, Dallas, USA Stanford University, California, USA

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1 of 1 people found the following review helpful
5.0 out of 5 stars nice overview November 17, 2011
By DK
Format:Hardcover|Verified Purchase
I am totally new to the semiconductor industry and this book seems like a good introduction to dive in.

As a process integration engineer knowledge of semiconductor processes is critical and this book seemed like a good first step for people with no background.

It has chapters ranging from semiconductor processes to reliability physics.

Agreed there are a few grammatical errors here and there but the knowledge is rich.
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1 of 1 people found the following review helpful
4.0 out of 5 stars Good stuff September 26, 2011
Format:Hardcover|Verified Purchase
This book has almost all the stuff you need to understand manufacturing of silicon wafer in very large scale. I would recommend this book for people to have an overview
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