An Introduction to Microelectromechanical Systems Engineering, Second Edition [Hardcover]

Nadim Maluf (Author), Kirt Williams (Author)

Book Description

ISBN-10: 1580535909 | ISBN-13: 978-1580535908 | Publication Date: June 30, 2004 | Edition: 2

MEMS (microelectromechanical systems) technology makes possible the production of miniature devices and systems that stand to revolutionize industrial, optical, medical and electronic markets. Thousands of practitioners and students have gained a solid understanding of MEMS with the best-selling first edition of this book. Now in its second edition, An Introduction to Microelectromechanical Systems Engineering brings readers to up-to-date with the latest developments in this cutting-edge area. Featuring brand new coverage of today's hottest topics, such as RF MEMS and photonic MEMS, this thoroughly revised resource shows engineers, technical managers, and executives how their projects may benefit from a MEMS solution.

Editorial Reviews

About the Author

Nadim Maluf is vice president of New Focus, Inc. and a consulting professor of electrical engineering at Stanford University. A best-selling author in the area of MEMS technology, Dr. Maluf earned his Ph.D. in electrical engineering at Stanford University. Kirt Williams is a MEMS consultant based in California's Silicon Valley. Formerly, he was a member of the technical staff at Agilent Technologies. He received his Ph.D. and M.S. in electrical engineering from the University of California at Berkeley.

Product Details

• Hardcover: 304 pages
• Publisher: Artech House Print on Demand; 2 edition (June 30, 2004)
• Language: English
• ISBN-10: 1580535909
• ISBN-13: 978-1580535908
• Product Dimensions: 10.3 x 7.1 x 0.8 inches
• Shipping Weight: 1.3 pounds (View shipping rates and policies)
• Average Customer Review: 4.3 out of 5 stars  See all reviews (6 customer reviews)
• Amazon Best Sellers Rank: #393,651 in Books (See Top 100 in Books)

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Customer Reviews

Most Helpful Customer Reviews

13 of 13 people found the following review helpful:

5.0 out of 5 stars Excellent Introduction to MEMS, January 8, 2002

By 

W J Karl (Munich, Germany) - See all my reviews

This review is from: An Introduction to Microelectromechanical Systems Engineering (Hardcover)

An excellent non-technical introduction to the subject of Micromechanical Systems (MEMS). Nadim Maluf manages to cover the most important technical and economical issues of this broad topic with outstanding clarity and brevity. The MEMS market, materials and common transducer effects are presented as well as fundamental microfabrication/ -machining techniques and device packaging aspects. Emphasis is on explaining the working principles and fabrication of diverse microsensors and microactuators by case studies of commercially available systems (Ink Jet, Pressure Sensor, Flow Sensor, Radiation Sensor, Accelerometer, Gyroscope, Gas Sensor, Microphone, Microvalve and Micromirror) and emerging devices (DNA Amplification and Analysis, RF Switch, Micromechanical Resonator and Filter, Micropump, Optical Switches and Grating Light Valve, Thermomechanical Data Storage). Great read, fantastic illustrations and a wealth of well selected references for further reading.

9 of 9 people found the following review helpful:

5.0 out of 5 stars Brief and to the point, April 16, 2001

By 

"ago2" (Ithaca, NY United States) - See all my reviews

This review is from: An Introduction to Microelectromechanical Systems Engineering (Hardcover)

I am working in the MEMS area, and found lots of useful facts and recommendations in this book. It does not go into too much theoretical detail, but has a "cook book" style. Good for a general introduction to MEMS.

11 of 12 people found the following review helpful:

5.0 out of 5 stars Excellent introduction to MEMS, March 21, 2000

By 

S. Jadhav (New York, NY) - See all my reviews
(REAL NAME)   

This review is from: An Introduction to Microelectromechanical Systems Engineering (Hardcover)

A very useful book for someone with even little or no background in semiconductor processing.Amazingly logical explanations and very addicting for a technical book !