An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function. This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.
An Introduction to Surface-Micromachining
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Inside This Book
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First Sentence:
New designers should first understand the processing steps involved in surface-micromachining, and how these basic processing steps are combined into manufacturing processes. Read the first page Key Phrases - Statistically Improbable Phrases (SIPs): (learn more)
reflow material, peeling bound, second structural layer, first structural layer, electrode actuators, bottom actuator, interference faults, flexure hinges, torsion hinges, geometric advantage, scissor hinges, flexure joints, enclosure rules, micromachining process, curved electrode, open toggle, electrostatic actuators, isolation layer, bulk micromachining, sacrificial material, surface micromachining, geometry rules, micromachined devices, wafer surface, anisotropic etchant Key Phrases - Capitalized Phrases (CAPs): (learn more)
Journal of Microelectromechanical Systems, Courtesy Sandia National Laboratories, Design Handbook, New York, Deposit Structural, Journal of the Electrochemical Society, New Jersey, Richard Feynman, University of California New!
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Front Cover | Table of Contents | First Pages | Index | Back Cover | Surprise Me!
New designers should first understand the processing steps involved in surface-micromachining, and how these basic processing steps are combined into manufacturing processes. Read the first page Key Phrases - Statistically Improbable Phrases (SIPs): (learn more)
reflow material, peeling bound, second structural layer, first structural layer, electrode actuators, bottom actuator, interference faults, flexure hinges, torsion hinges, geometric advantage, scissor hinges, flexure joints, enclosure rules, micromachining process, curved electrode, open toggle, electrostatic actuators, isolation layer, bulk micromachining, sacrificial material, surface micromachining, geometry rules, micromachined devices, wafer surface, anisotropic etchant Key Phrases - Capitalized Phrases (CAPs): (learn more)
Journal of Microelectromechanical Systems, Courtesy Sandia National Laboratories, Design Handbook, New York, Deposit Structural, Journal of the Electrochemical Society, New Jersey, Richard Feynman, University of California New!
Books on Related Topics | Concordance | Text Stats Browse Sample Pages:
Front Cover | Table of Contents | First Pages | Index | Back Cover | Surprise Me!
Citations (learn more)
This book cites 14
books:
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- Modern Physics by Raymond A. Serway on page 62, and page 151
- Mechanics of Materials (with CD-ROM and InfoTrac) by James M. Gere on page 73, and page 92
- Compliant Mechanisms by Larry L. Howell on page 73, and page 133
- Compliant Mechanisms: Design of Flexure Hinges by Nicolae Lobontiu on page 134
- Solid State Electronic Devices (6th Edition) by Ben Streetman on page 28
See all 14 books this book cites
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