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Lecture Notes on Principles of Plasma Processing 2003rd Edition

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ISBN-13: 978-0306474972
ISBN-10: 0306474972
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Product Details

  • Paperback: 208 pages
  • Publisher: Springer; 2003 edition (January 31, 2003)
  • Language: English
  • ISBN-10: 0306474972
  • ISBN-13: 978-0306474972
  • Product Dimensions: 8.3 x 0.5 x 11 inches
  • Shipping Weight: 1.2 pounds (View shipping rates and policies)
  • Average Customer Review: 3.0 out of 5 stars  See all reviews (1 customer review)
  • Amazon Best Sellers Rank: #1,619,050 in Books (See Top 100 in Books)

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4 of 4 people found the following review helpful By Kedar Hardikar on December 24, 2007
Format: Paperback Verified Purchase
I found this to be a good book for quick reading. However, you need Lieberman and Lichtenberg (L &L) for a detailed treatment. L & L is of course not a very pleasant reading, so this provides a good break to "keep moving" through the material.
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Lecture Notes on Principles of Plasma Processing
This item: Lecture Notes on Principles of Plasma Processing
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