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3 of 3 people found the following review helpful:
3.0 out of 5 stars
Good for quick reading, Need Lieberman's book,
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This review is from: Lecture Notes on Principles of Plasma Processing (Paperback)
I found this to be a good book for quick reading. However, you need Lieberman and Lichtenberg (L &L) for a detailed treatment. L & L is of course not a very pleasant reading, so this provides a good break to "keep moving" through the material.
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Lecture Notes on Principles of Plasma Processing by Francis F. Chen (Paperback - January 31, 2003)
$139.00 $110.66
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