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2 Reviews
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6 of 7 people found the following review helpful:
4.0 out of 5 stars
Great textbook for SPC & DOE's,
By A Customer
This review is from: Lithography Process Control (SPIE Tutorial Texts in Optical Engineering Vol. TT28) (Paperback)
This is one of the best texts I've seen in terms of understanding SPC's and DOE's for microlithography. This text is very very helpful for setting up SPC's for lithographic processes. It also helps greatly in setting up DOE frameworks for lithographic process development.I would definitely recommend this for anyone in the lithographic field.
5.0 out of 5 stars
Outstanding,
This review is from: Lithography Process Control (SPIE Tutorial Texts in Optical Engineering Vol. TT28) (Paperback)
Indispensable reference for process engineers. Very good coverage of the basics. I would also suggest you these references:i. Microlithography: Science and Technology by Bruce W. Smith ii. Principles of Lithography by Harry J. Levinson They are complementary. Enjoy! |
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Lithography Process Control (SPIE Tutorial Texts in Optical Engineering Vol. TT28) by Harry J. Levinson (Paperback - February 12, 1999)
$48.00
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