This is an introductory manual for Ion Assisted Deposition (IAD) procedures of thin films. It is addressed to researchers, post-graduates and even engineers with little or no experience in the techniques of thin film deposition. It reviews the basic concepts related to the interaction of low energy ion beams with materials. The main procedures used for IAD synthesis of thin films and the main effects of ion beam bombardment on growing films, such as densification, stress, mixing, surface flattening and changes in texture are critically discussed. A description of some of the applications of IAD methods and a review of the synthesis by IAD of diamond-like carbon and cubic-boron nitride complete the book.
FREE Two-Day Shipping for students on millions of items. Learn more |
Book Description
Editorial Reviews
From the Publisher
Readership: Researchers, post-graduate students and engineers with limited experience in the techniques of thin film deposition
Product Details
Would you like to update product info or give feedback on images?
|
More About the Author
Discover books, learn about writers, read author blogs, and more.
Customer Reviews
|
There are no customer reviews yet.
|
|||
|
Video reviews
|
Inside This Book
(learn more)
First Sentence:
The assistance of the deposition of thin films with ion bombardment produces significant modifications in their characteristics and therefore in their final properties. Read the first page Key Phrases - Statistically Improbable Phrases (SIPs): (learn more)
assisting ions, ion assistance, subplantation model, biaxial alignment, arrival ratio, vacuum arc deposition, spa content, impinging ions, thin film properties, nitride thin films, adatom mobility, normalised energy, spa bonded carbon, low ion energies, sputtering model, ion beam energy, interface mixing, ion bombardment, assisted evaporation, ion beam bombardment, ion beam mixing, low deposition temperatures, thermal spikes, stopping cross section, ion assisted deposition Key Phrases - Capitalized Phrases (CAPs): (learn more)
Thin Solid Films, Academic Press, New York, Vacuum Figure, Van Vechten, Applied Physics, Surf Coat New!
Books on Related Topics | Concordance | Text Stats Browse Sample Pages:
Front Cover | Table of Contents | First Pages | Index | Back Cover | Surprise Me!
The assistance of the deposition of thin films with ion bombardment produces significant modifications in their characteristics and therefore in their final properties. Read the first page Key Phrases - Statistically Improbable Phrases (SIPs): (learn more)
assisting ions, ion assistance, subplantation model, biaxial alignment, arrival ratio, vacuum arc deposition, spa content, impinging ions, thin film properties, nitride thin films, adatom mobility, normalised energy, spa bonded carbon, low ion energies, sputtering model, ion beam energy, interface mixing, ion bombardment, assisted evaporation, ion beam bombardment, ion beam mixing, low deposition temperatures, thermal spikes, stopping cross section, ion assisted deposition Key Phrases - Capitalized Phrases (CAPs): (learn more)
Thin Solid Films, Academic Press, New York, Vacuum Figure, Van Vechten, Applied Physics, Surf Coat New!
Books on Related Topics | Concordance | Text Stats Browse Sample Pages:
Front Cover | Table of Contents | First Pages | Index | Back Cover | Surprise Me!
Citations (learn more)
This book cites 11
books:
See all 11 books this book cites
- Ion Beam Assisted Film Growth (Beam Modification of Materials) by T. Itoh on page 88, and page 171
- Ion Implantation Range and Energy Deposition Distributions (Ion Implantation Range & Energy Deposition Distributions) by K. Bruce Winterbon on page 172
- The Stopping and Range of Ions in Solids (Stopping and Range of Ions in Matter, Vol 1) by J. F. Ziegler on page 46
- Solid State Physics: Advances in Research and Applications, Vol. 44 by Henry Ehrenreich in Back Matter
- Plasma Sources for Thin Film Deposition and Etching (Physics of Thin Films Volume 18) by Maurice H. Francombe on page 213
See all 11 books this book cites
Books on Related Topics
(learn more)
|
|
Tag this product(What's this?)Think of a tag as a keyword or label you consider is strongly related to this product.
Tags will help all customers organize and find favorite items. |
Sell a Digital Version of This Book in the Kindle Store
If you are a publisher or author and hold the digital rights to a book, you can sell a digital version of it in our Kindle Store.
Learn more
Customer Discussions
|
This product's forum
Active discussions in related forums
Search Customer Discussions
|
Related forums
|
Listmania!
So You'd Like to...
Look for Similar Items by Category
- Books > New & Used Textbooks > Engineering > Environmental Engineering
- Books > New & Used Textbooks > Science & Mathematics > Physics
- Books > Professional & Technical > Engineering
- Books > Science & Math > Physics > Applied
- Books > Science & Math > Physics > Electromagnetism
- Books > Science & Math > Physics > Solid-State Physics
- Books > Science & Math > Technology
