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MEMS: A Practical Guide to Design, Analysis, and Applications
 
 
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MEMS: A Practical Guide to Design, Analysis, and Applications [Hardcover]

Jan Korvink (Author, Editor), Oliver Paul (Author, Editor)

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Book Description

0815514972 978-0815514978 November 14, 2005 1
Does MEMS technology offer advantages to your company's products? Will miniature machines on a chip solve your application objectives for ôsmaller, better, cheaper, and faster'ö If you are a product development engineer or manager, the decision to design a MEMS device implies having an application and market. This book offers you a practical guide to making this important business decision. Here, both veterans and newcomers to MEMS device design will get advice on evaluating MEMS for their business, followed by guidance on selecting solutions, technologies and design support tools. You will see how experts from around the world have explored MEMS possibilities and achieved new breakthrough devices such as RF-MEMS for mobile telecommunications, micro-optics for internet hardware, catheter-based minimal-invasive operating theatre tools, and in vivo monitoring of exact dosage of medication in ailing patients. This handbook offers a wealth of analytical techniques treating problematic areas such as alternative designs reliability, packaging, and cost effectiveness.

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"The editors have done an excellent job in providing a handbook that will help companies maintain their competitive advantage now and into the future. û Wolfgang Menz, The Albert Ludwig University

About the Author

Jan G. Korvink holds the Chair for Microsystem Technology, specializing in MEMS modeling and low cost MEMS fabrication, at IMTEK–The Institute for Microsystem Technology – University of Freiburg, Germany. Dr. Korvink has authored and co-authored more than 120 technical publications including 6 book chapters in the MEMS area and one book. He was a founder of the Swiss company NM Numerical Modeling. He serves on the technical program committees of the following international conferences: Nanotech, DTIP, ESSDERC, EUROSIME, Eurosensors.

Oliver Paul holds the Chair for Microsystem Materials at IMTEK – The Institute for Microsystem Technology – University of Freiburg, Germany. His group focusses on MEMS materials, technologies, and devices. He is a co-author of more than 120 technical publications, two patents, and two books. He is a member of the editorial board of Sensors and Actuators A, has co-founded the Swiss MEMS company Sensirion, has served on the technical program committees of numerous European and international conferences, and is member of the Steering Committee of the IEEE MEMS conference.

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More About the Author

Jan G. Korvink is a Professor for Microsystems Engineering at the University of Freiburg in South Germany, where he leads the Laboratory for Microsystem Simulation.

He obtained his M.Sc. in mechanical engineering (specialising in computational mechanics) from the University of Cape Town in 1987, and his Ph.D. in applied computer science from the ETH Zurich in 1993. After his graduate studies, he joined the Physical Electronics Laboratory of the ETH Zurich, where he established and lead a MEMS Modelling Group. This was followed by a move in 1997 to the Albert Ludwig University in Freiburg, Germany. Currently, Dr. Korvink is a director of the School for Soft Matter Research, Freiburg Institute for Advanced Studies. He has written more that 180 journal and conference papers in the area of microsystem technology, and co-edits the review journal Applied Micro and Nanosystems, see http://www.wiley-vch.de/books/info/amn.

His research interests cover the computational design and low cost fabrication of microsystems, with a focus on applications in magnetic resonance.

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Inside This Book (learn more)
First Sentence:
Rooted in mechanical, electrical, and chemical engineering and relying on physical insight, biological techniques, and materials science know-how, microelectromechanical systems (MEMS) engineering is a fundamentally interdisciplinary field. Read the first page
Key Phrases - Statistically Improbable Phrases (SIPs): (learn more)
biomedical microsystems, vertical comb drive, scanning micromirrors, piezoelectric microactuators, pixel capacitance, optical insertion loss, electrostatic microactuators, reversible physisorption, microsensor systems, microsystem approach, mechanical microsensors, waveguide facet, additional fabrication steps, stripe waveguide, mechanical restoring force, variable optical attenuator, grating light valve, micromirror array, domain simulators, mechanical layer, polysilicon heater, parasitic influences, comb drives, heat flux sensors, mesh adaptivity
Key Phrases - Capitalized Phrases (CAPs): (learn more)
New York, International Conference, Actuator Workshop, Papers Transducers, Solid-State Sensor, Electron Devices, Hilton Head Island, Las Vegas, Technical Digest Transducers, The Netherlands, Fabrication Additional, Academic Press, Photonics Technol, Sensors Update, Kluwer Academic Publishers, Quantum Electron, Digest of Technical Papers, San Diego, Selected Topics, Thin Solid Films, University of Freiburg, Applications Typical, Artech House, Monte Carlo, Multiphysics Commercial
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