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Chemical Mechanical Planarization in Ic Device Manufacturing (Proceedings / Electrochemical Society)
  
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Chemical Mechanical Planarization in Ic Device Manufacturing (Proceedings / Electrochemical Society) [Hardcover]

R. L. Opila (Editor)

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Product Details

  • Hardcover: 273 pages
  • Publisher: Electrochemical Society (October 1998)
  • Language: English
  • ISBN-10: 156677201X
  • ISBN-13: 978-1566772013
  • Product Dimensions: 9.2 x 6.2 x 0.8 inches
  • Shipping Weight: 1.2 pounds
  • Amazon Best Sellers Rank: #10,380,579 in Books (See Top 100 in Books)

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