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Chemical Mechanical Polishing in Silicon Processing, Volume 63 (Semiconductors & Semimetals) (Vol 63) Hardcover – October 29, 1999

ISBN-13: 978-0127521725 ISBN-10: 0127521720 Edition: 1st

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Product Details

  • Series: Semiconductors & Semimetals (Book 63)
  • Hardcover: 307 pages
  • Publisher: Academic Press; 1 edition (October 29, 1999)
  • Language: English
  • ISBN-10: 0127521720
  • ISBN-13: 978-0127521725
  • Product Dimensions: 9.3 x 6.2 x 0.8 inches
  • Shipping Weight: 1.3 pounds
  • Average Customer Review: 3.5 out of 5 stars  See all reviews (2 customer reviews)
  • Amazon Best Sellers Rank: #4,540,733 in Books (See Top 100 in Books)

Editorial Reviews

About the Author

Robert M. Miller, Ph.D., CCC-SLP, BC-NCD, is chief of Audiology and Speech Pathology at the Veterans' Administration Medical Center, Seattle, Washington. He holds the position of clinical associate professor in the departments of Rehabilitation Medicine; Speech and Hearing Sciences; and Otolaryngology, Head, and Neck Surgery at the University of Washington, Seattle. A nationally recognized expert on management of swallowing disorders, Dr. Miller has authored numerous chapters and articles on the topic. He is co-author of the book Medical Speech Pathology. He is Board Certified by the Academy of Neurologic Communication Disorders and Sciences.

Robert M. Miller, Ph.D., CCC-SLP, BC-NCD, is chief of Audiology and Speech Pathology at the Veterans' Administration Medical Center, Seattle, Washington. He holds the position of clinical associate professor in the departments of Rehabilitation Medicine; Speech and Hearing Sciences; and Otolaryngology, Head, and Neck Surgery at the University of Washington, Seattle. A nationally recognized expert on management of swallowing disorders, Dr. Miller has authored numerous chapters and articles on the topic. He is co-author of the book Medical Speech Pathology. He is Board Certified by the Academy of Neurologic Communication Disorders and Sciences.

Customer Reviews

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Most Helpful Customer Reviews

By LCNine on May 15, 2012
Format: Kindle Edition
This well written text book is a must for anyone who is working with the CMP process. Text is logical and chanpters are well written.
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3 of 5 people found the following review helpful By A Customer on May 25, 2000
Format: Hardcover
This book give a lot of general information of different CMP operations and it is good for those who want to appear to be very knowledgable in CMP. But, as I say, it is too general. Quite a good overview but boring.
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