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Mechanics of Microelectromechanical Systems [Hardcover]

Nicolae Lobontiu (Author), Ephrahim Garcia (Author)

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Book Description

September 30, 2004 1402080131 978-1402080135 1

This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer's viewpoint as devices that transform an input form of energy into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy. The impetus of this proposal stems from the perception that such an approach might contribute to a more solid understanding of the principles governing the mechanics of MEMS, and would hopefully enhance the efficiency of modeling and designing reliable and desirably-optimized microsystems. The work represents an attempt at both extending and deepening the mechanical-based approach to MEMS in the static domain by providing simple, yet reliable tools that are applicable to micromechanism design through current fabrication technologies.


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Inside This Book (learn more)
First Sentence:
Stiffness is a fundamental qualifier of elastically-deformable mechanical microcomponents and micromechanisms whose static, modal or dynamic response need to be evaluated. Read the first page
Key Phrases - Statistically Improbable Phrases (SIPs): (learn more)
amplification microdevice, rectangular microcantilever, sought stiffness, input stiffness, symmetric compliance matrix, output stiffness, displacement theorem, electrostatic transduction, relative rotary motion, maximum tip deflection, serpentine spring, sin amax, flexure hinge, bloc force, compliant segments, free displacement, thermal bimorph, piezomagnetic materials, shuttle mass, thermal actuator, axial compliance, maximum rotation angle, torsional compliance, bent beam, displacement amplification
Key Phrases - Capitalized Phrases (CAPs): (learn more)
New York, Boca Raton, John Wiley, Journal of Microelectromechanical Systems, Problems Problem, Second Edition, Third Edition, Book Company, Dover Publications, Englewood Cliffs, Prentice Hall, Seventh Edition
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