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In this chapter, you will be introduced to the Semiconductor industry via a brief history, as well as by the importance of the industry in the world economy, an overview of the significant technical developments, and the trends that have made the industry the world's leading industrial segment.
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preseal inspection, wafer sort yield, mobile ionic contaminants, photomasking process, incomplete etch, exposed wafer surface, aligner tool, mobile ionic contamination, cum yield, patterning operation, fab area, develop inspect, layering operation, doping operation, fab yield, functioning die, larger diameter wafers, wafer boat, proximity aligners, gowning area, more process steps, wafer breakage, dopant concentration profile, wafer thinning, horizontal tube furnaces
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Semiconductor International, Cahners Publishing, Publishing Company, Review Questions, Objectives Upon, New York, Fabrication Principles, Lattice Press, Semiconductor Industry Association, Sunset Beach, John Wiley, Resist Oxide, Semiconductor Services, Bell Labs, San Jose, Federal Standard, Integrated Circuit Fabrication Technology, Perkin Elmer, Van Nostrand Reinhold, Hybrid Microcircuit Technology Handbook, Noyes Publications, Year of Production, Book Company, Chemical Mechanical Planarization of Microelectronic Materials, Copper Goes Mainstream
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