Microfabrication Techniques for Polymeric MEMS reviews recent progress made in the field of polymeric microelectromechanical (MEMS) devices, focusing on the fabrication techniques currently in use. The book begins with an overview of polymeric MEMS systems, their applications, the different polymers (photoresists, PMMA, polyimide, PDMS, thermosetting polymers) used, and the more traditional fabrication techniques. It proceeds to cover microstereolithography (MSL), one of the most common rapid prototyping techniques that has greatly reduced fabrication times for MEMS systems. The book concludes with descriptions of recent developments in applications of polymeric MEMS, including those that have gone on to prove commercially successful.
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