Customer Reviews

Microlithography Science and Technology

5 star:		(6)
4 star:		(0)
3 star:		(0)
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I teach a graduate class in Microlithography and this is the best text I have seen to date. It contains all the modern techniques presented in an easy to read format. I highly recommend this text for all process engineers in the field or engineers wishing to learn more about this integrated circuit processing technique.

Microlithography: Science and Technology has been a valuable reference text. I would recommend this book be on the desk of anyone in the field of microlithography.

The book provides a great overview of the Electron Beam Lithography, which was the material of interest for me. Material is conveyed in great detail while the meaning of the material is not necessarily constricted to the experts. As an undergraduate student, I found the material readable. I was also able to understand most of the information well and as a result I believe I have a good base of knowledge about lithography. I would definitely recommend this book to other students.

The book give a very good overview of what microlithography is and it gives the recent advances in the field. I highly recommend it as something very good to have if your into the field of lithography and especially if you are a non engineer.

this book consists almost everything u need to be a lithographer and is also concise and up-to-date!

also the price is not too high.

good book!

A great book that gives a quick overview from contact printing and projection aligners (1970's and early 1980's technology), but it spends most of its time and effort on the more recent (2000's) technology and processes. There was information packed into each page, providing both an overview and detail into the more recent development of lithography. It helps to have some previous exposure to lithography as well as the topics of physics, optics, and chemistry since the book will build on all of these subjects to provide the basis of the newer technology.