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6 Reviews
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6 of 6 people found the following review helpful
5.0 out of 5 stars Very up to date information from leaders in the field., August 1, 1999
By A Customer
This review is from: Microlithography: Science and Technology (Hardcover)
I teach a graduate class in Microlithography and this is the best text I have seen to date. It contains all the modern techniques presented in an easy to read format. I highly recommend this text for all process engineers in the field or engineers wishing to learn more about this integrated circuit processing technique.
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5 of 5 people found the following review helpful
5.0 out of 5 stars Excellent reference text for the lithographer!, June 14, 1999
By A Customer
This review is from: Microlithography: Science and Technology (Hardcover)
Microlithography: Science and Technology has been a valuable reference text. I would recommend this book be on the desk of anyone in the field of microlithography.
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2 of 2 people found the following review helpful
5.0 out of 5 stars E-beam Lithography, May 8, 2000
By A Customer
This review is from: Microlithography: Science and Technology (Hardcover)
The book provides a great overview of the Electron Beam Lithography, which was the material of interest for me. Material is conveyed in great detail while the meaning of the material is not necessarily constricted to the experts. As an undergraduate student, I found the material readable. I was also able to understand most of the information well and as a result I believe I have a good base of knowledge about lithography. I would definitely recommend this book to other students.
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2 of 2 people found the following review helpful
5.0 out of 5 stars Great Text Book for Microlithography, April 2, 2000
By A Customer
This review is from: Microlithography: Science and Technology (Hardcover)
The book give a very good overview of what microlithography is and it gives the recent advances in the field. I highly recommend it as something very good to have if your into the field of lithography and especially if you are a non engineer.
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1 of 1 people found the following review helpful
5.0 out of 5 stars best book for the pro, September 26, 2002
This review is from: Microlithography: Science and Technology (Hardcover)
this book consists almost everything u need to be a lithographer and is also concise and up-to-date!
also the price is not too high.
good book!
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5.0 out of 5 stars A quick review, October 19, 2004
By 
PeterE (Phoenix, AZ) - See all my reviews
This review is from: Microlithography: Science and Technology (Hardcover)
A great book that gives a quick overview from contact printing and projection aligners (1970's and early 1980's technology), but it spends most of its time and effort on the more recent (2000's) technology and processes. There was information packed into each page, providing both an overview and detail into the more recent development of lithography. It helps to have some previous exposure to lithography as well as the topics of physics, optics, and chemistry since the book will build on all of these subjects to provide the basis of the newer technology.
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Microlithography: Science and Technology
Microlithography: Science and Technology by Kazuaki Suzuki (Hardcover - May 27, 1998)
Used & New from: $14.98
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