Micromachines as Tools for Nanotechnology (Microtechnology and MEMS) [Hardcover]

Hiroyuki Fujita (Editor)

Book Description

ISBN-10: 354000856X | ISBN-13: 978-3540008569 | Publication Date: August 13, 2003 | Edition: 1

Addresses the use of MEMS (micro-electro-mechanical systems) and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology. Such micromachined tools for nanotechnology can enhance the sensitivity, spatial resolution, dexterity, selectivity, and parallel processing capability in measuring and manipulating nano-objects. The book covers state-of-the-art MEMS and NEMS devices for DNA molecular handling and analysis, cell handling and culture on a chip, chemical lab-on-a-chip, multi-probes for vacuum tunneling microscopy and AFM, and characterization of quantum semiconductor structures. Readers will gain deep insight into such developments and students will learn about the emerging field of MEMS and nanotechnology

Editorial Reviews

From the Back Cover

This book addresses the use of MEMS and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology. Such micromachined tools for nanotechnology can enhance the sensitivity, spatial resolution, dexterity, selectivity, and parallel processing capability in measuring and manipulating nano-objects. The book covers state-of-the-art MEMS and NEMS devices for DNA molecular handling and analysis, cell handling and culture on a chip, chemical lab-on-a-chip, multi-probes for vacuum tunneling microscopy and AFM, and characterization of quantum semiconductor structures. Readers will gain deep insight into such developments and students will learn about the emerging field of MEMS and nanotechnology.

Product Details

• Hardcover: 224 pages
• Publisher: Springer; 1 edition (August 13, 2003)
• Language: English
• ISBN-10: 354000856X
• ISBN-13: 978-3540008569
• Product Dimensions: 9.5 x 6.3 x 0.7 inches
• Shipping Weight: 1 pounds (View shipping rates and policies)
• Amazon Best Sellers Rank: #5,754,555 in Books (See Top 100 in Books)

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