Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer.
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Editorial Reviews
From the Back Cover
Electrical Engineering Micromechanics and MEMS Classic and Seminal Papers to 1990 Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, consumer products, genetic engineering, aerospace and microsatellites, communication, the military, data storage, games and toys, food preparation, chemical processing, sensors, and microactuators. In fact, most fields will find uses for micromechanics in the next ten years. Micromechanics and MEMS gives you convenient access to the fundamental papers in this rapidly growing field. Until now, papers written during the earlier stages of this field have been difficult to retrieve. Micromechanics and MEMS presents seminal papers in micromechanics, up to and including papers written in 1990. This volume gives you an historical perspective of the field and insight into where the field is heading. The papers are arranged by topic, with an introduction to each section written by expert and editor, William Trimmer. Topics covered include:
- Side drive, comb drive, electrostatic, magnetic, and harmonic actuators
- Valves and pumps
- Fluidics
- Surface and bulk micromachining
- LIGA
- Computer-aided design
- Metrology
About the Author
About the Editor William S. Trimmer has been working in micromechanics since 1985. He is currently with Belle Mead Research, Inc. Dr. Trimmer co-organized the first workshop in the MEMS series, "Micro Robots and Teleoperators Workshop;" co-organized the National Science Foundation (NSF) workshop on Microelectromechanical Systems Research; co-edited the NSF report "Small Machines, Large Opportunities: A Report on the Emerging Field of Microdynamics;" edited a special section of the Sensors and Actuators Journal; and started the "Micromechanics" section in the Sensors and Actuators Journal. He organized the first joint IEEE/ASME journal, The Journal of Microelectromechanical Systems, and was the editor for the first six years.
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Most Helpful Customer Reviews
3 of 3 people found the following review helpful:
5.0 out of 5 stars
Excellent book on the seminal research and development.,
By rstroud@capaccess.org (Sterling, VA) - See all my reviews
This review is from: Micromechanics and MEMS: Classic and Seminal Papers to 1990 (Paperback)
Dr. Trimmer's book is a wealth of articles from the early days of MEMS. I highly recommend it for any serious students and professionals in the field. For the student it provides insights into the original research and development. The first, and perhaps most significant paper that I recommend for students is "Microrobots and Micromechanical Systems" beginning on page 96. An understanding of scaling laws, as presented in this paper, is essential to an understanding of the potential and utility of MEMS. The professional will also find this book to be an excellent desk reference.
1 of 1 people found the following review helpful:
5.0 out of 5 stars
Great introduction to the MEMS field!,
By A Customer
This review is from: Micromechanics and MEMS: Classic and Seminal Papers to 1990 (Paperback)
Everyone interested in MEMS should have a copy of this book. A good introduction to the early, and piviotal papers in the field.
1 of 1 people found the following review helpful:
5.0 out of 5 stars
Good Book,
By A Customer
This review is from: Micromechanics and MEMS: Classic and Seminal Papers to 1990 (Paperback)
Excellent tutorial review of small mechanical systems (also called Microelectromechanical Systems, and micro system technology, mst, and Micro Machines). The first chapter is especially helpful
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Inside This Book
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Key Phrases - Statistically Improbable Phrases (SIPs):
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neutral file, airflow velocity, acceleration measurements, microsystems technology, cybernetic actuator, microdynamical systems, micromotor structure, micron sized robot, fiber servo system, rotor conductivity, microelectromechanical design, wobble motor design, microfabricated electric actuators, normally close microvalve, electric origin acting, hydraulic relaxation, average electric torque, electromagnetic impulsive force, comer undercutting, striped electrodes, mask corner compensation, rotary electrostatic motor, electrostatic linear motor, charge actuator, electrostatic film actuator Key Phrases - Capitalized Phrases (CAPs): (learn more)
Electron Devices, New York, Technical Digest, Salt Lake City, International Conference, Micro Electro Mechanical Systems, Hilton Head Island, Elsevier Sequoia, Napa Valley, Bell Laboratories, University of California, National Science Foundation, Material Property Simulator, Structure Simulator, San Francisco, Mechanical Material, Stanford University, There's Plenty of Room, Academic Press, Solid-State Sensors Workshop, Berkeley Sensor, Book Company, Micro Electromechanical Systems Workshop, Semiconductor Silicon, Ann Arbor Browse Sample Pages:
Front Cover | Table of Contents | First Pages | Index | Back Cover | Surprise Me!
neutral file, airflow velocity, acceleration measurements, microsystems technology, cybernetic actuator, microdynamical systems, micromotor structure, micron sized robot, fiber servo system, rotor conductivity, microelectromechanical design, wobble motor design, microfabricated electric actuators, normally close microvalve, electric origin acting, hydraulic relaxation, average electric torque, electromagnetic impulsive force, comer undercutting, striped electrodes, mask corner compensation, rotary electrostatic motor, electrostatic linear motor, charge actuator, electrostatic film actuator Key Phrases - Capitalized Phrases (CAPs): (learn more)
Electron Devices, New York, Technical Digest, Salt Lake City, International Conference, Micro Electro Mechanical Systems, Hilton Head Island, Elsevier Sequoia, Napa Valley, Bell Laboratories, University of California, National Science Foundation, Material Property Simulator, Structure Simulator, San Francisco, Mechanical Material, Stanford University, There's Plenty of Room, Academic Press, Solid-State Sensors Workshop, Berkeley Sensor, Book Company, Micro Electromechanical Systems Workshop, Semiconductor Silicon, Ann Arbor Browse Sample Pages:
Front Cover | Table of Contents | First Pages | Index | Back Cover | Surprise Me!
Citations (learn more)
2
books
cite this book:
- Mems Packaging (EMIS Processing) by Tai-Ran Hsu in Back Matter
- Thin Film Materials: Stress, Defect Formation and Surface Evolution by L. B. Freund in Back Matter
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