- Hardcover: 689 pages
- Publisher: Springer; 1st ed. 2000. Corr. 2nd printing 2004 edition (December 8, 2004)
- Language: English
- ISBN-10: 0792372468
- ISBN-13: 978-0792372462
- Product Dimensions: 6.1 x 1.5 x 9.2 inches
- Shipping Weight: 2.5 pounds (View shipping rates and policies)
- Average Customer Review: 4.5 out of 5 stars See all reviews (14 customer reviews)
Amazon Best Sellers Rank:
#618,765 in Books (See Top 100 in Books)
- #140 in Books > Engineering & Transportation > Engineering > Industrial, Manufacturing & Operational Systems > Industrial Technology
- #162 in Books > Engineering & Transportation > Engineering > Electrical & Electronics > Electronics > Microelectronics
- #314 in Books > Science & Math > Physics > Mechanics
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Microsystem Design 1st ed. 2000. Corr. 2nd printing 2004 Edition
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Top Customer Reviews
Senturia's approach to some chapters strikes me as a little idiosyncratic, but he does convey the principles quite well. His love for the material shines through in a way that many authors cannot manage.
Unlike books on single topics, this text cannot be used as a definitive guide to anything. Because Sentuira only has only 30 pages or so for each of the very broad topics that he covers, he doesn't cover any of them in much depth. However, the reader does get a sense of the issues that each physical domain presents. For those who need to know more, Senturia provides a short list of further reading in each chapter. I think of this book as a comprehensive starting point that can help me determine what further investigation I need.
Aesthetically, the text is somewhat lacking. The small pages are cramped compared to those of larger-format texts, and the figures are subpar.
The book scope is very broad in a sense that makes it miss essential details and concepts.
It may work as a first introduction to the subject for students approaching the subjects for their first time, but it can't serve as a reference. It is simply very shallow and the topic is too broad to be lumped in a single book.
The sections on mathematical modeling are especially good, and the set of detailed examples at the end are clear and illustrative.
To name some drawbacks, the chapter on fabrication is maybe a bit out of date, and more solved practical exercises are missing.
The text's coverage is somewhat uneven, in places it seems overly detailed, and in others too sparse. However, one of my colleagues (and another reviewer) identified completely different over- and under-coverage sections, so I'm going to consider it to be personal taste as much as anything else.
In short, it's a good, but not perfect text. It gets five stars though for being the best there is at the moment.
Most Recent Customer Reviews
our teacher wasn't very good, this book was a little more helpful than herPublished 1 month ago by Erika
Quite good. The tracking is ok. The book is what i needed. But seems not so up to date. It is really a classic basic book.Published 10 months ago by Di Zhuang
This is a simple reference to everything important and relevant in the world of MEMS. Buy it, read it, and understand the industry.Published on March 23, 2014 by Rohan Parker
I liked reading about MEMS. It has many examples and information. I could have seen more writting on how to start making a device, but overall, it was an informative textbook.Published on February 26, 2013 by Damien Noga
The book is very well written and discussed both aspects of MEMS - fabrication and design.
Fabrication part is well written and can be clearly understood. Read more