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Microsystem Design Hardcover – July 29, 2005

ISBN-13: 978-0792372462 ISBN-10: 0792372468 Edition: 1st ed. 2000. Corr. 2nd printing 2004

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Microsystem Design + Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set + Practical MEMS: Design of microsystems, accelerometers, gyroscopes, RF MEMS, optical MEMS, and microfluidic systems
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Product Details

  • Hardcover: 689 pages
  • Publisher: Springer; 1st ed. 2000. Corr. 2nd printing 2004 edition (July 29, 2005)
  • Language: English
  • ISBN-10: 0792372468
  • ISBN-13: 978-0792372462
  • Product Dimensions: 9.4 x 6.7 x 1.6 inches
  • Shipping Weight: 2.5 pounds (View shipping rates and policies)
  • Average Customer Review: 4.4 out of 5 stars  See all reviews (11 customer reviews)
  • Amazon Best Sellers Rank: #121,919 in Books (See Top 100 in Books)

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Most Helpful Customer Reviews

9 of 11 people found the following review helpful By A Customer on November 25, 2003
Format: Hardcover
The book tries to cover many different topics at the same time and sometimes makes a quite messy work. However, the book has very good chapters and not so good ones. It provides a good introduction on MEMS fabrication, but a more interested reader will find difficult to fabricate MEMS with the given information. Chapters 5,6,7 and 8 are excellent, but chapters 9, 10,11 and 12 are incomplete and not easily understandable for a Electrical Engineer graduate student. Chapter 13 begins with general equations to be simplified considerably later, giving the impression to the reader that he has learned only a little about fluids. Chapter 11 is quite confusing and chapter 12 lack examples in 2D and 3D lumped models.
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2 of 2 people found the following review helpful By I. Gurin on October 27, 2008
Format: Hardcover Verified Purchase
In 23 chapters, Senturia brings together a dizzying array of fields of engineering necessary to design micro-electro-mechanical systems (MEMS) and examples of MEMS products. For instance, he covers Euler beam theory, the Navier-Stokes equation, micromachining, feedback circuits, and electronic noise, and then anchors these topics with a gyroscope and a DNA amplifier, among other devices.

Senturia's approach to some chapters strikes me as a little idiosyncratic, but he does convey the principles quite well. His love for the material shines through in a way that many authors cannot manage.

Unlike books on single topics, this text cannot be used as a definitive guide to anything. Because Sentuira only has only 30 pages or so for each of the very broad topics that he covers, he doesn't cover any of them in much depth. However, the reader does get a sense of the issues that each physical domain presents. For those who need to know more, Senturia provides a short list of further reading in each chapter. I think of this book as a comprehensive starting point that can help me determine what further investigation I need.

Aesthetically, the text is somewhat lacking. The small pages are cramped compared to those of larger-format texts, and the figures are subpar.
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2 of 2 people found the following review helpful By Bichoy Bahr on March 8, 2013
Format: Hardcover Verified Purchase
The book tries to cover different aspects and fields involved in the microsystems design (MEMS).
The book scope is very broad in a sense that makes it miss essential details and concepts.
It may work as a first introduction to the subject for students approaching the subjects for their first time, but it can't serve as a reference. It is simply very shallow and the topic is too broad to be lumped in a single book.
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2 of 2 people found the following review helpful By Bishal Nepal on January 29, 2009
Format: Hardcover Verified Purchase
This book is a good graduate level MEMS book, but do not think that you will be able to design a MEMS chip after just reading. I bought this one as a part of MEMS Design course at Northeastern University. MEMS students should be familiar with pSpice circuit simulation and Matlab in order to even start thinking of designing MEMS. Microfabrication, the way it is explained here, is very brief, and not very useful.
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1 of 1 people found the following review helpful By Damien Noga on February 26, 2013
Format: Hardcover Verified Purchase
I liked reading about MEMS. It has many examples and information. I could have seen more writting on how to start making a device, but overall, it was an informative textbook.
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Format: Hardcover Verified Purchase
This book is definitely a must-have for anyone interested in MEMS design. It's one of the classic references on microsystems that everyone should have read at least once.

The sections on mathematical modeling are especially good, and the set of detailed examples at the end are clear and illustrative.

To name some drawbacks, the chapter on fabrication is maybe a bit out of date, and more solved practical exercises are missing.
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