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Microsystem Design [Hardcover]

Stephen D. Senturia
4.4 out of 5 stars  See all reviews (11 customer reviews)

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Book Description

July 29, 2005 0792372468 978-0792372462
The goal of this book is to bring together into one accessible text the fundamentals of the many disciplines needed by today's engineer working in the field of microelectromechanical systems (MEMS).
The subject matter is wide-ranging: microfabrication, mechanics, heat flow, electronics, noise, and dynamics of systems, with and without feedback. Because it is very difficult to enunciate principles of `good design' in the abstract, the book is organized around a set of Case Studies that are based on real products, or, where appropriately well-documented products could not be found, on thoroughly published prototype work.
The Case Studies were selected to sample a multidimensional space: different manufacturing and fabrication methods, different device applications, and different physical effects used for transduction. The Case Study subjects are: the design and packaging of a piezoresistive pressure sensor, a capacitively-sensed accelerometer, a quartz piezoelectrically-driven and sensed rate gyroscope, two electrostatically-actuated optical projection displays, two microsystems for the amplification of DNA, and a catalytic sensor for combustible gases.
This book is used for a graduate course in `Design and Fabrication of Microelectromechanical Devices (MEMS)' at the Massachusetts Institute of Technology. It is appropriate for textbook use by senior/graduate courses in MEMS, and will be a useful reference for the active MEMS professional.
Each chapter is supplemented with homework problems and suggested related reading. In addition, the book is supported by a web site that will include additional homework exercises, suggested design problems and related teaching materials, and software used in the textbook examples and homework problems.

Frequently Bought Together

Microsystem Design + Practical MEMS: Design of microsystems, accelerometers, gyroscopes, RF MEMS, optical MEMS, and microfluidic systems + Foundations of MEMS (2nd Edition)
Price for all three: $336.17

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Product Details

  • Hardcover: 689 pages
  • Publisher: Springer (July 29, 2005)
  • Language: English
  • ISBN-10: 0792372468
  • ISBN-13: 978-0792372462
  • Product Dimensions: 9.4 x 6.7 x 1.6 inches
  • Shipping Weight: 2.5 pounds (View shipping rates and policies)
  • Average Customer Review: 4.4 out of 5 stars  See all reviews (11 customer reviews)
  • Amazon Best Sellers Rank: #168,959 in Books (See Top 100 in Books)

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Customer Reviews

Most Helpful Customer Reviews
8 of 10 people found the following review helpful
3.0 out of 5 stars Review on microsystem design November 25, 2003
By A Customer
The book tries to cover many different topics at the same time and sometimes makes a quite messy work. However, the book has very good chapters and not so good ones. It provides a good introduction on MEMS fabrication, but a more interested reader will find difficult to fabricate MEMS with the given information. Chapters 5,6,7 and 8 are excellent, but chapters 9, 10,11 and 12 are incomplete and not easily understandable for a Electrical Engineer graduate student. Chapter 13 begins with general equations to be simplified considerably later, giving the impression to the reader that he has learned only a little about fluids. Chapter 11 is quite confusing and chapter 12 lack examples in 2D and 3D lumped models.
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1 of 1 people found the following review helpful
3.0 out of 5 stars The book has a broad coverage without focus March 8, 2013
Format:Hardcover|Verified Purchase
The book tries to cover different aspects and fields involved in the microsystems design (MEMS).
The book scope is very broad in a sense that makes it miss essential details and concepts.
It may work as a first introduction to the subject for students approaching the subjects for their first time, but it can't serve as a reference. It is simply very shallow and the topic is too broad to be lumped in a single book.
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1 of 1 people found the following review helpful
4.0 out of 5 stars Good for coursebook, but not very detailed January 29, 2009
Format:Hardcover|Verified Purchase
This book is a good graduate level MEMS book, but do not think that you will be able to design a MEMS chip after just reading. I bought this one as a part of MEMS Design course at Northeastern University. MEMS students should be familiar with pSpice circuit simulation and Matlab in order to even start thinking of designing MEMS. Microfabrication, the way it is explained here, is very brief, and not very useful.
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1 of 1 people found the following review helpful
5.0 out of 5 stars Wonderful book on a complex subject October 27, 2008
Format:Hardcover|Verified Purchase
In 23 chapters, Senturia brings together a dizzying array of fields of engineering necessary to design micro-electro-mechanical systems (MEMS) and examples of MEMS products. For instance, he covers Euler beam theory, the Navier-Stokes equation, micromachining, feedback circuits, and electronic noise, and then anchors these topics with a gyroscope and a DNA amplifier, among other devices.

Senturia's approach to some chapters strikes me as a little idiosyncratic, but he does convey the principles quite well. His love for the material shines through in a way that many authors cannot manage.

Unlike books on single topics, this text cannot be used as a definitive guide to anything. Because Sentuira only has only 30 pages or so for each of the very broad topics that he covers, he doesn't cover any of them in much depth. However, the reader does get a sense of the issues that each physical domain presents. For those who need to know more, Senturia provides a short list of further reading in each chapter. I think of this book as a comprehensive starting point that can help me determine what further investigation I need.

Aesthetically, the text is somewhat lacking. The small pages are cramped compared to those of larger-format texts, and the figures are subpar.
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5.0 out of 5 stars Love it March 23, 2014
Format:Hardcover|Verified Purchase
This is a simple reference to everything important and relevant in the world of MEMS. Buy it, read it, and understand the industry.
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5.0 out of 5 stars Good book on MEMS February 26, 2013
Format:Hardcover|Verified Purchase
I liked reading about MEMS. It has many examples and information. I could have seen more writting on how to start making a device, but overall, it was an informative textbook.
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