Microsystem Design (Hardcover)

by Stephen D. Senturia (Author) "In Europe, they are called "Microsystems..." (more)
Key Phrases: thermal energy domain, conjugate power variables, resistor axis, New York, Case Study, Related Reading (more...)

Editorial Reviews

Product Description
The goal of this book is to bring together into one accessible text the fundamentals of the many disciplines needed by today's engineer working in the field of microelectromechanical systems (MEMS).

The subject matter is wide-ranging: microfabrication, mechanics, heat flow, electronics, noise, and dynamics of systems, with and without feedback. Because it is very difficult to enunciate principles of `good design' in the abstract, the book is organized around a set of Case Studies that are based on real products, or, where appropriately well-documented products could not be found, on thoroughly published prototype work.

The Case Studies were selected to sample a multidimensional space: different manufacturing and fabrication methods, different device applications, and different physical effects used for transduction. The Case Study subjects are: the design and packaging of a piezoresistive pressure sensor, a capacitively-sensed accelerometer, a quartz piezoelectrically-driven and sensed rate gyroscope, two electrostatically-actuated optical projection displays, two microsystems for the amplification of DNA, and a catalytic sensor for combustible gases.

This book is used for a graduate course in `Design and Fabrication of Microelectromechanical Devices (MEMS)' at the Massachusetts Institute of Technology. It is appropriate for textbook use by senior/graduate courses in MEMS, and will be a useful reference for the active MEMS professional.

Each chapter is supplemented with homework problems and suggested related reading. In addition, the book is supported by a web site that will include additional homework exercises, suggested design problems and related teaching materials, and software used in the textbook examples and homework problems.

Product Details

• Hardcover: 720 pages
• Publisher: Springer (December 8, 2004)
• Language: English
• ISBN-10: 0792372468
• ISBN-13: 978-0792372462
• Product Dimensions: 9.4 x 6 x 1.6 inches
• Shipping Weight: 2.5 pounds (View shipping rates and policies)
• Average Customer Review: 4.3 out of 5 stars See all reviews (6 customer reviews)
• Amazon.com Sales Rank: #178,431 in Books (See Bestsellers in Books)

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  #11 in	Books > Professional & Technical > Engineering > Industrial, Manufacturing & Operational Systems > Systems
  #12 in	Books > Computers & Internet > Computer Science > Circuitry > Microelectronic Devices
  #35 in	Books > Professional & Technical > Engineering > Electrical & Electronics > Electronics > Microelectronics

Customer Reviews

Most Helpful Customer Reviews

1 of 1 people found the following review helpful:

4.0 out of 5 stars not that useful as a textbook, October 17, 2007

By	Mehmet Akgul - See all my reviews (REAL NAME)

This book is good just for a starter's guide to MEMS. It just touches a wide range of topics. But if you want to learn the subject with real understanding, then this book can not help you.

4 of 6 people found the following review helpful:

3.0 out of 5 stars Review on microsystem design, November 25, 2003

By A Customer

The book tries to cover many different topics at the same time and sometimes makes a quite messy work. However, the book has very good chapters and not so good ones. It provides a good introduction on MEMS fabrication, but a more interested reader will find difficult to fabricate MEMS with the given information. Chapters 5,6,7 and 8 are excellent, but chapters 9, 10,11 and 12 are incomplete and not easily understandable for a Electrical Engineer graduate student. Chapter 13 begins with general equations to be simplified considerably later, giving the impression to the reader that he has learned only a little about fluids. Chapter 11 is quite confusing and chapter 12 lack examples in 2D and 3D lumped models.

5.0 out of 5 stars Good senior level introduction to MEMS textbook, April 30, 2009

By	Michael A. Duvernois (Minneapolis, MN United States) - See all my reviews (REAL NAME)

A good senior in physics or electrical engineering would be able to use this as either a textbook or a self-study book as an introduction to MEMS. Could you go off and build a new device after reading this book? Probably not, but you could go off and work with a group of more experienced individuals and built a device. This would get you up to speed.

The text's coverage is somewhat uneven, in places it seems overly detailed, and in others too sparse. However, one of my colleagues (and another reviewer) identified completely different over- and under-coverage sections, so I'm going to consider it to be personal taste as much as anything else.

In short, it's a good, but not perfect text. It gets five stars though for being the best there is at the moment.