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Bonding in Microsystem Technology (Springer Series in Advanced Microelectronics)
 
 
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Bonding in Microsystem Technology (Springer Series in Advanced Microelectronics) [Hardcover]

Jan A. Dziuban (Author)

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Book Description

July 26, 2006 1402045786 978-1402045783 1
This is the first compendium on silicon/glass microsystems made by deep wet etching and the first book with a detailed description of bonding techniques used in microsystem technology. Technological results presented in the book have been tested experimentally by the author and his team, and can be utilized in day-to-day laboratory practice. Special attention has been paid to the highest level of accessibility of the book by students.

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From the reviews: "Any one interested in bonding in microsystem technology will likely be well served by this outstanding volume which is addressed to scientists and researchers, as well as to academic teachers and students, engineers active in the field of electric/electronics and microelectronics. … Technological results presented in the book have been tested experimentally by the author and his team, and can be utilized in day-to-day laboratory practice. Special attention has been paid to the highest level of accessibility of the book by students." (Current Engineering Practice, 2007)

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Inside This Book (learn more)
Key Phrases - Statistically Improbable Phrases (SIPs): (learn more)
surface bonding energy, bossed membrane, anodic bonding, brand silicon, microsvstem technology, hermetic cavities, micromechanical details, movable constructions, hydrophilic bonding, silicon wafer bonding, foil bonding, wet anisotropic etching, silicon micromechanics, bonded sandwich, thin glass layer, silicon glass bonding, spontaneous bonding, bonding proceeds, bonded wafers, eutectic bonding, fusion bonding, etch window, fun min, thermal oxide layer, anisotropic silicon etching
Key Phrases - Capitalized Phrases (CAPs): (learn more)
European Conf, Transducers Southampton, Abstract Meeting, Fall Mtg, San Francisco
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