This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
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Book Description
Editorial Reviews
Review
From the reviews: "This book is aimed at people working on simulation and optimization process fabrication of Microelectromechanical Systems (MEMS). … the book provides a fairly complete view of the modeling of microfabrication processes. … ‘It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications’." (Grégory Guisbiers, Physicalia, Vol. 26 (1), 2004)
From the Back Cover
This book addresses modeling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of these systems are presented, graphically illusratted, and discussed in the light of experimental results. Knowledge gained from such models is essential for system operation and optimization. This book is unique in that it focuses on high aspect ratio microtechnology. It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications.
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Inside This Book
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First Sentence:
Ion beam technology is of vital importance in the area of microfabrication. Read the first page Key Phrases - Statistically Improbable Phrases (SIPs): (learn more)
percent monomer conversion, acoustic agitation, photophysical ablation, etch depth per pulse, heat diffusion model, ablated depth, ablation velocity, laser chemical vapor deposition, mask membrane, photophysical model, absorber edge, dissolution distance, slowness curve, high aspect ratio microstructures, soft focusing, proximity gap, monomer layer, polymer ablation, bottom dose, ablation depth, solidified polymer, ion beam technology, maximum temperature rise, thick gold film, sputter yield Key Phrases - Capitalized Phrases (CAPs): (learn more)
Elsevier Science, American Institute of Physics, American Vacuum Society, Francis Inc, Publishing Limited, American Chemical Society, Allerton Press Inc, Francis Ltd, New York, American Physical Society, Monte Carlo, Conversion Fig, Marcel Dekker Inc, Navier Stokes, University Press New!
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Front Cover | Table of Contents | First Pages | Index | Back Cover | Surprise Me!
Ion beam technology is of vital importance in the area of microfabrication. Read the first page Key Phrases - Statistically Improbable Phrases (SIPs): (learn more)
percent monomer conversion, acoustic agitation, photophysical ablation, etch depth per pulse, heat diffusion model, ablated depth, ablation velocity, laser chemical vapor deposition, mask membrane, photophysical model, absorber edge, dissolution distance, slowness curve, high aspect ratio microstructures, soft focusing, proximity gap, monomer layer, polymer ablation, bottom dose, ablation depth, solidified polymer, ion beam technology, maximum temperature rise, thick gold film, sputter yield Key Phrases - Capitalized Phrases (CAPs): (learn more)
Elsevier Science, American Institute of Physics, American Vacuum Society, Francis Inc, Publishing Limited, American Chemical Society, Allerton Press Inc, Francis Ltd, New York, American Physical Society, Monte Carlo, Conversion Fig, Marcel Dekker Inc, Navier Stokes, University Press New!
Books on Related Topics | Concordance | Text Stats Browse Sample Pages:
Front Cover | Table of Contents | First Pages | Index | Back Cover | Surprise Me!
Citations (learn more)
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6
books
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- Conduction of Heat in Solids by H. S. Carslaw in Back Matter
- Numerical Analysis 1999 (Chapman & Hall/CRC Research Notes in Mathematics Series) by G.A. Watson in Back Matter
- Applied Numerical Analysis (7th Edition) by Curtis F. Gerald in Back Matter
- Cryogenic Systems (Monographs on Cryogenics) by Randall F. Barron in Back Matter
- Spectral Methods in Fluid Dynamics (Springer Series in Computational Physics) by C. Canuto in Back Matter
See all 8 books this book cites
- Laser Diode Microsystems (Microtechnology and MEMS) by Hans Zappe in Front Matter
- Force Sensors for Microelectronic Packaging Applications (Microtechnology and MEMS) by Jürg Schwizer in Front Matter
- CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms (Microtechnology and MEMS) by Flora Li in Front Matter
- Silicon Microchannel Heat Sinks: Theories and Phenomena (Microtechnology and MEMS) by Lian Zhang in Front Matter
- Micromechanical Photonics (Microtechnology and MEMS) by Hiroo Ukita in Front Matter
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