This book gives professional microwave and semiconductor IC design and process engineers the information they need to apply GaAs processing techniques for improved reliability.
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4 of 4 people found the following review helpful:
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It's readable,
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This review is from: Modern GaAs Processing Methods (Artech House Microwave Library) (Hardcover)
Even though this book is specified to GaAs, it still covers the general processing of semiconductors. This book is helpful for beginners for understanding the fundamentals of the processing. However, the references of this book are not updated since it was published in 1990. The index is poor; therefore you may not find the topic you want through the index but it is there.
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