In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
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Inside This Book
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First Sentence:
The physics of semiconductor device operation and the design of integrated circuits have been well treated in the literature. Read the first page Key Phrases - Statistically Improbable Phrases (SIPs): (learn more)
laser pantography, bipotential lens, crossover radius, unipotential lens, crossover plane, layering technologies, window frame pattern, ion projection lithography, inorganic resists, triode gun, reactive plasma etching, beam half angle, crossover size, linewidth control, projection printers, electron resist, demagnified image, plasma focus, electron mirrors, screen lens, quadrupole lens, electron lithography, resist film, coupled electrode, object aperture Key Phrases - Capitalized Phrases (CAPs): (learn more)
New York, Electron Devices, Academic Press, Plenum Press, Solid State Technol, Electron Phys, Scanning Electron Microsc, Microstructure Science, Monte Carlo, Stanford University, Lawrence Livermore National Laboratory, November December, San Francisco, Surface Sci, Cambridge University Press, Electrochemical Society, January February, Oxford University Press, University of California Press, Bell Syst, Electron Beam Technology, Ion Bombardment of Solids, London Ser, Pergamon Press, Physics of Thin Films New!
Books on Related Topics | Concordance | Text Stats Browse Sample Pages:
Front Cover | Table of Contents | First Pages | Index | Back Cover | Surprise Me!
The physics of semiconductor device operation and the design of integrated circuits have been well treated in the literature. Read the first page Key Phrases - Statistically Improbable Phrases (SIPs): (learn more)
laser pantography, bipotential lens, crossover radius, unipotential lens, crossover plane, layering technologies, window frame pattern, ion projection lithography, inorganic resists, triode gun, reactive plasma etching, beam half angle, crossover size, linewidth control, projection printers, electron resist, demagnified image, plasma focus, electron mirrors, screen lens, quadrupole lens, electron lithography, resist film, coupled electrode, object aperture Key Phrases - Capitalized Phrases (CAPs): (learn more)
New York, Electron Devices, Academic Press, Plenum Press, Solid State Technol, Electron Phys, Scanning Electron Microsc, Microstructure Science, Monte Carlo, Stanford University, Lawrence Livermore National Laboratory, November December, San Francisco, Surface Sci, Cambridge University Press, Electrochemical Society, January February, Oxford University Press, University of California Press, Bell Syst, Electron Beam Technology, Ion Bombardment of Solids, London Ser, Pergamon Press, Physics of Thin Films New!
Books on Related Topics | Concordance | Text Stats Browse Sample Pages:
Front Cover | Table of Contents | First Pages | Index | Back Cover | Surprise Me!
Citations (learn more)
This book cites 61
books:
See all 61 books this book cites
3
books
cite this book:
- The Physics of Submicron Lithography (Microdevices) by Kamil A. Valiev in Front Matter, and page 547
- Handbook of Thin Film Technology (McGraw-Hill Handbooks) by Leon I. Maissel on page 52, and page 446
- Oriented Crystallization on Amorphous Substrates (Microdevices) by E.I. Givargizov in Front Matter, and page 450
- Physics and Technology of Semiconductor Devices (A Wiley International Edition) by A. S. Grove on page 52, and page 446
- Laser Processing and Analysis of Materials by Walter W. Duley on page 256, and page 257
See all 61 books this book cites
- Metal- and Metalloid-Containing Macromolecules: 39th IUPAC Congress, Ottawa, Canada (Macromolecular Symposia) by Alaa S. Abd-El-Aziz on page 76
- Functional Organic and Polymeric Materials: Molecular Functionality-Macroscopic Reality by Tim H. Richardson on page 29
- Handbook of Chemical and Biological Sensors by R.F Taylor on page 345
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