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2 of 2 people found the following review helpful:
5.0 out of 5 stars
Great book about Poly,
By Kevin Cunningham (Sunnyvale, CA, USA) - See all my reviews
This review is from: Polycrystalline Silicon for Integrated Circuits and Displays (Hardcover)
This is the essential book about poly if your life, like mine, revolves entirely around poly. This well-written book contains basic information on the deposition, film properties, and electrical characteristics of poly-Si, as well as the techniques used to analyze poly-Si. The references are invaluable. There has been substantial development on the application of poly, like logic gate electrode, and on single-wafer deposition since this book was published, but I would not start reading the latest literature without reading Kamins first. I wish every step in the chip manufacturing process had as thurough a treatment as poly-Si gets here.
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Polycrystalline Silicon for Integrated Circuits and Displays by Theodore I. Kamins (Hardcover - July 31, 1998)
$259.00
In Stock | |
 
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