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Practical MEMS: Design of microsystems, accelerometers, gyroscopes, RF MEMS, optical MEMS, and microfluidic systems Hardcover – March 17, 2009

ISBN-13: 978-0982299104 ISBN-10: 0982299109

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Product Details

  • Hardcover: 496 pages
  • Publisher: Small Gear Publishing (March 17, 2009)
  • Language: English
  • ISBN-10: 0982299109
  • ISBN-13: 978-0982299104
  • Product Dimensions: 7 x 10 x 1.1 inches
  • Shipping Weight: 2.2 pounds (View shipping rates and policies)
  • Average Customer Review: 5.0 out of 5 stars  See all reviews (8 customer reviews)
  • Amazon Best Sellers Rank: #479,680 in Books (See Top 100 in Books)

More About the Author

Ville Kaajakari is an Assistant Professor at Louisiana Tech University, Institute for Micromanufacturing (IfM). He received his Ph.D. degree from University of Wisconsin-Madison in 2002. From 2002 to 2006, Dr. Kaajakari was employed at the VTT Technical Research Center of Finland where he was a project manager for developing micromechanical reference oscillators. Dr. Kaajakari has published over 40 scientific publications in the field of micromechanics and holds multiple patents.

Customer Reviews

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The book is well written, and the practical examples facilitate understanding of the subject.
Antti Jaakkola
This book gives an excellent outline of the design process, fabrication, and cost analysis of developing a MEMS device.
J. Sweeney
It is the book I will be using to teach the first year graduate class on MEMS at my university.
C. Wilson

Most Helpful Customer Reviews

2 of 2 people found the following review helpful By Antti Jaakkola on September 2, 2009
Format: Hardcover
As a MEMS professional I find this book an invaluable complement to the selection of MEMS textbooks - I wish this book had existed already when I started my career in the field. The book is well written, and the practical examples facilitate understanding of the subject. For me, especially the chapters on readout electronics have helped me become a better MEMS designer. I highly recommend investing in this book.
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4 of 5 people found the following review helpful By S. McNamara on April 8, 2009
Format: Hardcover
I am very happy to see this book. It covers MEMS devices. It does not cover microfabrication techniques -- there other books for that subject. It is not a survey book. This is a good book, and it is filled with a lot of useful equations. The book is also very easy to read, and it has a number of good examples. This book is perfect for someone who wants to design MEMS devices.
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Format: Hardcover Verified Purchase
This book gives an excellent outline of the design process, fabrication, and cost analysis of developing a MEMS device. Highly recommended for courses focusing on MEMS development or as a reference for those experienced in the field.
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Format: Hardcover
This book is good for understanding and implementing practical applications for MEMS devices. It covers many different types of devices as well as different types of sensing elements used in these devices. It has chapters covering noise in the micromechanical systems, signal amplification and noise associated with the amplifiers showing how each part affects the overall device. I think that this books is a good investment.
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