Secondary Ion Mass Spectrometry: A Practical Handbook for Depth Profiling and Bulk Impurity Analysis [Hardcover]

Robert G. Wilson (Author), Fred A. Stevie (Author), Charles W. Magee (Author)

Book Description

ISBN-10: 0471519456 | ISBN-13: 978-0471519454 | Publication Date: November 1989 | Edition: 1

Seco ndary Ion Mass Spectrometry Basic Concepts, Instrumental Aspects, Applications and Trends (Volume 86 in Chemical Analysis: A Series of Monographs on Analytical Chemistry and Its Applications) A. Benninghoven, F. G. Rüdenauer, and H. W. Werner "[This book] is (and probably will be for a long time ahead) the standard book on secondary ion mass spectrometry." —Trends in Analytical Chemistry "This is a monumental work, and contains nearly 600 illustrations and over 2,000 references covering nearly all the essential published information up to 1985. The book will certainly find its place as a reference work in most laboratories using this methodology" —Analytica Chimica Acta 1987 (0 471-01056-1) 1,227 pp. Secondary Ion Mass Spectrometry Proceedings of the Sixth International Conference on Secondary Ion Mass Spectrometry (SIMS VI) Edited by A. Benninghoven, A.M. Huber, and H. W. Werner "The international SIMS conferences have been held every two years since 1977. They are recognized as one of the major forums for scientists, instrument manufacturers, and other researchers actively engaged in this rapidly expanding field…this volume is a valuable account of the latest advances in the field of SIMS, and of the research trends of some of the most respected experts in the field.…it is recommended for the libraries of all academic and industrial institutions where SIMS research is ongoing.…it should prove a valuable reference source for years to come." —Applied Spectroscopy 1988 (0 471-91832-6) 1,078 pp.

Editorial Reviews

From the Publisher

A guide to how and when to use secondary ion mass spectrometry (SIMS), describing the procedures and revealing many of the fine points of the quantitative capabilities of SIMS as applied to many kinds of materials. This information is not to be found elsewhere in book form and, for the most part, is not published in the literature. Offers many tips and tricks to obtaining and interpreting SIMS data in depth-profiling and bulk-impurity analysis, supported by data obtained using both magnetic sector and quadrupole instruments. Includes many illustrative examples and applications, together with hundreds of figures and tables.

From the Inside Flap

Secondary Ion Mass Spectrometry: A Practical Handbook for Depth Profiling and Bulk Impurity Analysis shows SIMS analysts how to acquire improved data and gain a better understanding of that data. This Handbook is unique—the information is not found elsewhere in book form, and, for the most part, is not published in the literature. The purpose of the Handbook is entirely practical—it shows how and where to use SIMS, describing the procedures and revealing the fine points of the quantitative capabilities of SIMS applied to many kinds of materials. It also explains how to employ special effects. Problems often encountered in obtaining and interpreting SIMS data are discussed in detail, along with their solutions. This practical knowledge of how to employ SIMS to best advantage has been gathered over the years through the authors’ direct experience in SIMS analysis. Central to the discussion is the use of SIMS in depth profiling and bulk impurity analysis (not treated are static analysis or first monolayer analysis). Ion imaging is discussed where it may be used to elucidate problems encountered in depth profiling and bulk analysis. However, the concepts treated in the Handbook are equally applicable to areas such as geology, metallurgy, and organic materials, as shown in the examples. The data included here were obtained using both magnetic sector and quadrupole instruments. The hundreds of figures and tables make this book informative and easy to use. The Handbook also includes many examples and applications, primarily from microelectronics. The appendixes contain a wealth of information—especially valuable are the relative sensitivity factor tables. Experienced SIMS analysts, and those new to the practice, will find this Handbook an indispensable companion at the workbench.

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Product Details

• Hardcover: 384 pages
• Publisher: Wiley-Interscience; 1 edition (November 1989)
• Language: English
• ISBN-10: 0471519456
• ISBN-13: 978-0471519454
• Product Dimensions: 10.3 x 7.4 x 1.1 inches
• Shipping Weight: 2.2 pounds
• Average Customer Review: 5.0 out of 5 stars  See all reviews (1 customer review)
• Amazon Best Sellers Rank: #6,082,506 in Books (See Top 100 in Books)

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Most Helpful Customer Reviews

5.0 out of 5 stars If you do SIMS you need this book!, September 1, 1998

By A Customer

This review is from: Secondary Ion Mass Spectrometry: A Practical Handbook for Depth Profiling and Bulk Impurity Analysis (Hardcover)

A well rounded pratical reference book for the SIMS analyst.