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5 of 7 people found the following review helpful:
5.0 out of 5 stars
Lithography,
By A Customer
This review is from: Semiconductor Lithography: Principles, Practices, and Materials (Microdevices) (Paperback)
This is the most comprehensive book about semiconductor lithography available today. It holds information on every aspect of optical lithography for people new in this field. And it is a valuable handbook and source for processing resist for those already familiar with SC lithography.
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Semiconductor Lithography: Principles, Practices, and Materials (Microdevices) by Wayne M. Moreau (Paperback - December 31, 1987)
Used & New from: $99.99
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