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Semiconductor Manufacturing Handbook (McGraw-Hill Handbooks S) 1st Edition

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ISBN-13: 978-0071445597
ISBN-10: 0071445595
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Hardcover, April 27, 2005
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Semiconductor Manufacturing Handbook (McGraw-Hill Handbooks S) + Handbook of Semiconductor Manufacturing Technology, Second Edition + Fundamentals of Semiconductor Manufacturing and Process Control
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Editorial Reviews

From the Back Cover


This is a comprehensive reference to the semiconductor manufacturing process and ancillary facilities -- from raw material preparation to packaging and testing, applying basics to emerging technologies. Readers charged with optimizing the design and performance of manufacturing processes will find all the information necessary to produce the highest quality chips at the lowest price in the shortest time possible. The Semiconductor Manufacturing Handbook provides leading-edge information on semiconductor wafer processes, MEMS, nanotechnology, and FPD, plus the latest manufacturing and automation technologies, including:

  • Yield Management
  • Automated Material Handling System
  • Fab and Cleanroom Design and Operation
  • Gas Abatement and Waste Treatment Management
  • And much more

Written by 60 international experts, and peer reviewed by a seasoned advisory board, this handbook covers the fundamentals of relevant technology and its real-life application and operational considerations for planning, implementing, and controlling manufacturing processes. It includes hundreds of detailed illustrations and a list of relevant books, technical papers, and websites for further research. This inclusive, wide-ranging coverage makes the Semiconductor Manufacturing Handbook the most comprehensive single-volume reference ever published in the field.


How Chips Are Designed and Made * Substrates * Copper and Low-k Dielectrics * Silicide Formation * Plasma * Vacuum * Photomask
Microlithography * Ion Implantation * Etch * PVD/ALD * CVD * ECD * Epitaxy * CMP * Wet Cleaning
Packaging * Grinding, Stress Relief, Dicing * Inspection, Measurement, and Testing
Specialty Gas System and DCA * Gas Abatement Systems * Chemical and Slurries Delivery System * Ultra Pure Water
Yield Management * Automated Materials Handling System * Metrology * Six Sigma * Advanced Process Control * EHS * Fab Design and Construction * Cleanroom * Vibration and Acoustic Control * ESD * Airborne Molecular Control * Particle Monitoring * Wastewater Neutralization Systems

About the Author

Hwaiyu Geng, CMfgE, P.E. (Palo Alto, California) is a Project Manager of Corporate REWS at Hewlett-Packard Company. His experience in manufacturing engineering is diverse, including work at Applied Materials and Hewlett-Packard’s high-tech industries. He has faced many of the challenges facing engineers today, having designed manufacturing processes and facilities for new products, implemented automated manufacturing systems, and established quality, safety, and maintenance programs. He is a Certified Manufacturing Engineer by the Society of Manufacturing Engineers and a Professional Engineer in the State of California. Mr. Geng is also the author of McGraw-Hill's Manufacturing Engineering Handbook.

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Product Details

  • Series: McGraw-Hill Handbooks S
  • Hardcover: 800 pages
  • Publisher: McGraw-Hill Education; 1 edition (April 27, 2005)
  • Language: English
  • ISBN-10: 0071445595
  • ISBN-13: 978-0071445597
  • Product Dimensions: 7.3 x 2.1 x 9.4 inches
  • Shipping Weight: 3.7 pounds (View shipping rates and policies)
  • Average Customer Review: 5.0 out of 5 stars  See all reviews (1 customer review)
  • Amazon Best Sellers Rank: #1,641,164 in Books (See Top 100 in Books)

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Most Helpful Customer Reviews

6 of 7 people found the following review helpful By Edward J. McInerney on July 19, 2005
Format: Hardcover
This book provides an excellent overview of all aspects of semiconductor manufacturing. Many books on semiconductor processing focus on the "front end" processing: ion implantation, lithography, thin film deposition and so on. These are, of course, critical steps in manufacturing integrated circuits, but there are many other aspects as well, such as metrology, clean room management, particles, yield management, material handling, and waste management. This is the only book I am aware of that covers everything. As the author of the CVD chapter, I may not be 100% objective, but I have found this handbook to be a great reference.

The downside of such a comprehensive book is it can not go into each topic in great depth. And because many authors contributed, there is some unevenness from chapter to chapter. But overall, this is an excellent resource for people who need to understand modern techniques of semiconductor manufacturing.
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