"I strongly recommend this book for those who want to learn device characterization." (IEEE Circuits & Devices Magazine
, November/December 2006)
From the Publisher
The first book devoted to modern techniques of semiconductor characterization, this comprehensive guide to semiconductor measurement methods is detailed enough for a two-term graduate course. Organized for quick access so that it can be used as a handbook of specific characterization techniques. Processes are characterized through the use of test structures and the main techniques used within the semiconductor industry are thoroughly explained. While the majority of the book is devoted to widely used electrical characterization methods, the more specialized optical, chemical and physical methods are also covered. Contains over 1,300 references.
--This text refers to an out of print or unavailable edition of this title.