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Semiconductor Sensors [Hardcover]

Simon M. Sze (Editor)

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Book Description

0471546097 978-0471546092 October 1994 1
An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.

A solutions manual is available upon request from the Wiley editorial board.

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An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.

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Inside This Book (learn more)
First Sentence:
The word "sensor" is derived from the Latin sentire which means "to perceive". Read the first page
Key Phrases - Statistically Improbable Phrases (SIPs): (learn more)
stray stresses, longitudinal piezoresistance coefficient, piezoresistance coefficients, piezoelectric capacitor, piezoresistance effect, radiant signal, traditional transducer, measurand range, semiconductor sensors, modulating sensors, sacrificial etching, piezoresistive pressure sensors, floating membrane, piezoresistive sensors, summary and future trends, galvanomagnetic effects, semiconductor plate, sensing nodes, sensor characterization, integrated sensors, reactive growth, matrix entrapment, biological sensing element, digital compensation, suspension beams
Key Phrases - Capitalized Phrases (CAPs): (learn more)
New York, Electron Devices, Hilton Head, Micro Electromechanical Systems, Solid-State Sensors Actuators, Oxford Science Publications, Academic Press, John Wiley, Marcel Dekker, Ultrasonics Symp, Electron Device Lett, University of California, Ultrasonic Symp, Ultrasonics Svmp, Adam Hilger, Comprehensive Survey, Oxford University Press, Practical Approach, Solid-State Circuits, Solid-State Electron, Bell System Tech, Englewood Cliffs, Semiconductor Silicon
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