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Silicon Processing for the VLSI Era, Vol. 1: Process Technology
 
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Silicon Processing for the VLSI Era, Vol. 1: Process Technology [Hardcover]

Stanley Wolf (Author), Richard N. Tauber (Author)
4.0 out of 5 stars  See all reviews (1 customer review)


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Product Details

  • Hardcover: 660 pages
  • Publisher: Lattice Press; 1st edition (January 1986)
  • Language: English
  • ISBN-10: 0961672137
  • ISBN-13: 978-0961672133
  • Product Dimensions: 9.3 x 7.2 x 1.3 inches
  • Shipping Weight: 2.8 pounds
  • Average Customer Review: 4.0 out of 5 stars  See all reviews (1 customer review)
  • Amazon Best Sellers Rank: #731,385 in Books (See Top 100 in Books)

 

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12 of 12 people found the following review helpful:
4.0 out of 5 stars A good summary of modern Silicon processing technique, August 23, 1996
By A Customer
This review is from: Silicon Processing for the VLSI Era, Vol. 1: Process Technology (Hardcover)
A thorough, if somewhat dry (makes the wall street journal look like a Sweet Valley High novel) treatment of modern semiconductor fabrication processes. This text is intended as a detailed overview of the processes involved in semiconductor design, particularly MOS technologies. In this regard it works well, through it shouldn't be considered a reference manual for the wafer fabrication engineer. A good summary for people who, like myself, work in the semiconductor industry, but do not deal with the details of fabrication processes on a daily basis.
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