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12 of 12 people found the following review helpful:
4.0 out of 5 stars
A good summary of modern Silicon processing technique,
By A Customer
This review is from: Silicon Processing for the VLSI Era, Vol. 1: Process Technology (Hardcover)
A thorough, if somewhat dry (makes the wall street journal
look like a Sweet Valley High novel) treatment of modern
semiconductor fabrication processes. This text is intended
as a detailed overview of the processes involved in semiconductor
design, particularly MOS technologies. In this regard it
works well, through it shouldn't be considered a reference
manual for the wafer fabrication engineer. A good summary
for people who, like myself, work in the semiconductor industry,
but do not deal with the details of fabrication processes on a
daily basis.
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Silicon Processing for the VLSI Era, Vol. 1: Process Technology by Richard N. Tauber (Hardcover - Jan. 1986)
Used & New from: $5.00
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