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Research on silicon sensors started about 25 years ago as a kind of spin-off of mainstream research on silicon microelectronic technology and circuits [1.1].
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Key Phrases - Statistically Improbable Phrases (SIPs):
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smart sensor concept, piezoelectric zinc oxide films, epilayer doping concentration, epitaxial layer doping concentration, micromechanical layers, sensor industry, pressure sensor market, smart pressure sensor, zinc oxide layer, etch rate reduction, fabrication compatibility, deep boron diffusion, probe shank, sacrificial etching, price experience curve, bipolar processing, standard bipolar process, silicon sensors, lateral pnp transistor, surface micromachining process, stimulating sites, transduction effects, microelectronic process, stimulating probes, substrate doping concentration
Key Phrases - Capitalized Phrases (CAPs):
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Ultrasonics Symp, Proceedings Transducers, San Francisco, Proceedings Eurosensors, Delft University, Nippon Denso, Signal Output, Silicon Valley, Electron Devices, International Conference, Proceedings of Sensors Expo, Technical Digest, Lattice Press, Twente University
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