Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications [Hardcover]

David Attwood (Author)

Book Description

ISBN-10: 0521652146 | ISBN-13: 978-0521652148 | Publication Date: August 28, 1999

This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include EUV lithography, biomicroscopy, spectromicroscopy, EUV astronomy, synchrotron radiation, and soft x-ray lasers. He also provides a great deal of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science.

Editorial Reviews

Review

"The region of the electromagnetic spectrum covered by this excellently written and produced book has only become available to exploitation over the last couple of decades or so...every researcher, teacher and student involved with the generation, manipulation or applications of electromagnetic radiation in this part of the spectrum should make space on their desk (not the bookshelf, since it won't spend much time there!) for this wonderful addition to the literature." Contemporary Physics

Product Details

• Hardcover: 486 pages
• Publisher: Cambridge University Press (August 28, 1999)
• Language: English
• ISBN-10: 0521652146
• ISBN-13: 978-0521652148
• Product Dimensions: 10.1 x 7.2 x 1.1 inches
• Shipping Weight: 2.3 pounds
• Average Customer Review: 5.0 out of 5 stars  See all reviews (4 customer reviews)
• Amazon Best Sellers Rank: #3,225,497 in Books (See Top 100 in Books)

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Customer Reviews

Most Helpful Customer Reviews

5 of 5 people found the following review helpful:

5.0 out of 5 stars A very good textbook, May 5, 2000

By A Customer

This review is from: Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications (Hardcover)

I took the class taught by the author at UC-Berkeley while he was finishing up this text (I also proofread a couple of the chapters as part of the class - you can find my name and the names of my classmates in the acknowledgements).

The text is very clearly written. An undergraduate physics / engineering level of understanding of electromagnetics and quantum mechanics is sufficient background for most the textbook. Most of the calculations are done semi-classically which helps for people not well versed in quantum mechanics. It also serves nicely as a reference text.

Topics covered include:
- Grazing incidence optics
- Normal incidence multi-layer mirrors
- Synchrotron radiation
- Cyclotrons, wigglers and undulators
- Plasma physics with applications to EUV and X-ray sources
- Fresnel zone plates
- Coherence
- EUV and X-ray lithograpy
- ...

The textbook stands alone nicely ... you do not need to constantly look up results in other sources and texts.

The textbook also contains a wealth of reference materials (several appendices of atomic data for X-ray transitions, cross sections, mathematical tables, ...)

1 of 1 people found the following review helpful:

5.0 out of 5 stars good book, October 3, 2002

By 

Ivan Bazarov (NY, USA) - See all my reviews

This review is from: Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications (Hardcover)

i found this book to be an excellent educational material on soft x-ray science

p.s. please note that there is a web-site by the author with the actual lectures available for watching absolutely free

[...]

5.0 out of 5 stars an excellent book!, October 31, 2003

By 

"bsrf" (PR China) - See all my reviews

This review is from: Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications (Hardcover)

I lent this book from the library in our institute, and this book is very suitable to us, who do research with Synchrotron Radiation in the region of soft X-ray. Many directions of research for soft X-ray are included in this book.
I can't afford it because it is very expensive for me, although I like it very much!