While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.
Spectroscopic Ellipsometry and Reflectometry: A User's Guide
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2 of 3 people found the following review helpful:
5.0 out of 5 stars
Spectroscopic Ellipsometry and Reflectometry - A Users Guide,
By James B. Wilhelm Jr (Round Rock, Texas USA) - See all my reviews
This review is from: Spectroscopic Ellipsometry and Reflectometry: A User's Guide (Hardcover)
Most useful book on this subject I have ever read.
5.0 out of 5 stars
Book on SE,
By Ester van Gerwen (Veldhoven, Noord-Brabant Netherlands) - See all my reviews
This review is from: Spectroscopic Ellipsometry and Reflectometry: A User's Guide (Hardcover)
A good follow up on Tompkins "A user's guide to Ellipsometry". This book deals with Spectroscopic Ellipsometry, but also covers the basics of single-wavelength ellipsometry. The book covers analysis of Thermal Oxide, PECVD SiO, SiO2, SiN, a-Si, etc. It also covers the mathematics behind the Lorentz oscillator, used in SE layer modelling.
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Inside This Book
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First Sentence:
The concept of using light to measure the thickness of a thin film is quite old. Read the first page Key Phrases - Statistically Improbable Phrases (SIPs): (learn more)
ellipsometric psi, calculated model data, tabulated optical constants, optical constant spectra, measured optical data, resulting optical constants, thick photoresist film, ellipsometric spectra, ellipsometric data, prototypical analysis, determining optical constants, total reflection coefficient, roughness layer, absolute reflectance, delta data, spectroscopic ellipsometers, oxynitride film, variable model parameters, spectroscopic ellipsometry, metrology tools, polysilicon film, interference oscillations, reflectance data, thermal oxide, principal angle Key Phrases - Capitalized Phrases (CAPs): (learn more)
New York, Academic Press, Handbook of Optical Constants of Solids, Sample Figure, North Holland, Sir Isaac Newton, Principles of Optics New!
Books on Related Topics | Concordance | Text Stats Browse Sample Pages:
Front Cover | Table of Contents | First Pages | Index | Back Cover | Surprise Me!
The concept of using light to measure the thickness of a thin film is quite old. Read the first page Key Phrases - Statistically Improbable Phrases (SIPs): (learn more)
ellipsometric psi, calculated model data, tabulated optical constants, optical constant spectra, measured optical data, resulting optical constants, thick photoresist film, ellipsometric spectra, ellipsometric data, prototypical analysis, determining optical constants, total reflection coefficient, roughness layer, absolute reflectance, delta data, spectroscopic ellipsometers, oxynitride film, variable model parameters, spectroscopic ellipsometry, metrology tools, polysilicon film, interference oscillations, reflectance data, thermal oxide, principal angle Key Phrases - Capitalized Phrases (CAPs): (learn more)
New York, Academic Press, Handbook of Optical Constants of Solids, Sample Figure, North Holland, Sir Isaac Newton, Principles of Optics New!
Books on Related Topics | Concordance | Text Stats Browse Sample Pages:
Front Cover | Table of Contents | First Pages | Index | Back Cover | Surprise Me!
Citations (learn more)
This book cites 11
books:
See all 11 books this book cites
- Handbook of Optical Constants of Solids, Five-Volume Set: Handbook of Optical Constants of Solids: Volume 1 (Academic Press Handbook) by Edward D. Palik on 8 pages
- Principles of Optics: Electromagnetic Theory of Propagation, Interference and Diffraction of Light by Max Born on 4 pages
- Numerical Recipes: The Art of Scientific Computing by William H. Press on page 22, page 107, and Back Matter
- Concepts of Classical Optics (Dover Books on Physics) by John Strong on page 21, page 97, and Back Matter
- A Treatise on Optics by David Brewster on page 4, and page 21
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